Problem karlsuss SNF 2012-11-20 16:34:51: Wafer tray doesn't stay

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Fri Jan 11 13:07:28 PST 2013


wafer tray cable was preventing the tray from coming in and out
easily, adjusted the cable and moved it to a different location ,
 everything good , system back to normal, Ok to use. 



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