lithography on quartz

[Sanli Ergun]

Hi everybody,
I believe there are people working with quartz wafers. My question is to
those who do. How do you do the exposure? I mean how do you manage the
multiple reflections from the backside? To be more specific I have
polysilicon, silicon nitride and polysilicon deposited on the quartz wafer
in the order given. Does anyone have such an experience, or suggestions?

Sanli