From mahnaz at snf.stanford.edu Fri Dec 1 15:32:57 2000 From: mahnaz at snf.stanford.edu (Mahnaz Mansourpour) Date: Fri, 01 Dec 2000 15:32:57 -0800 Subject: KS update Message-ID: <3A283529.77357991@snf.stanford.edu> Hello all, Karl suss engineers worked on the system till 6 in the afternoon. They fixed the problem with BSA and the Vacuum contact and adjusted the WEC. As you know I have lost ( for good) my resolution mask, I used a mask on loan to me from Mary Tang. All the lines and spaces looks very good on both hard and vacuum contact on 1 um 3612 resist. I did have a little trouble with the left mask focus knobs (intermittent). I will ask Mike to look into it. The system is up and no turning off the system for any reason what so ever. mahnaz