From mahnaz at snf.stanford.edu Tue Oct 10 16:29:57 2000 From: mahnaz at snf.stanford.edu (Mahnaz Mansourpour) Date: Tue, 10 Oct 2000 16:29:57 -0700 Subject: Karl suss down Message-ID: <39E3A675.29CCF2F4@snf.stanford.edu> HI folks, Karl suss is down. Starting last Friday afternoon the system start giving "Wafer vacuum loss" I did do training on Monday and got that error and still was able to get by and after me two more people were able to use it. Some one turned the system OFF to clear the error and we could not turn the system back on. Mario has spent long hours on it and fixed few of the problems caused by turning off the system. There is a sign posted on the system that it says Do not turn the system off. I am not sure how to state that I do not want you to turn the system off. There is a procedure we follow when we turn it off, when you turn it off and on again the stage bangs it self to the sides and causes more problems. Now, one problem and a wrong action lead to a much bigger problem. karl suss has been called and we are waiting to see when they are able to send some one down to fix the problem. I will send an email to notify you as soon as the system is up. mahnaz -------------- next part -------------- An HTML attachment was scrubbed... URL: From florando at leland.Stanford.EDU Tue Oct 31 11:46:39 2000 From: florando at leland.Stanford.EDU (Jeff Florando) Date: Tue, 31 Oct 2000 11:46:39 -0800 Subject: Reservation Message-ID: <4.1.20001031114523.00944a00@florando.pobox.stanford.edu> Hi, I just wanted to let people know that I will not be using my 2:30-4:00 reservation of the Karlsuss. Thanks, Jeff From sylviajs at stanford.edu Tue Oct 31 15:53:06 2000 From: sylviajs at stanford.edu (S. J. Smullin) Date: Tue, 31 Oct 2000 15:53:06 -0800 (PST) Subject: dry film photoresist Message-ID: Does anybody know anything about using dry film photoresist? Like how to expose/develop it? Thanks. Sylvia