From dcchu at stanford.edu  Thu Feb  1 09:26:52 2001
From: dcchu at stanford.edu (Dachen Chu)
Date: Thu, 1 Feb 2001 09:26:52 -0800 (PST)
Subject: Please take my time slot
Message-ID: <Pine.GSO.4.31.0102010925130.29590-100000@saga18.Stanford.EDU>

Hi, there

Because headway is done, I can't use my karlsuss researvatoin 10pm-12pm.
sorry for late notice

Dachen



From cmpark7 at stanford.edu  Mon Feb 12 14:58:33 2001
From: cmpark7 at stanford.edu (Changman Park)
Date: Mon, 12 Feb 2001 15:58:33 -0700
Subject: Free 3 to 4:30
Message-ID: <002901c09547$66bdb820$8e6a40ab@stanford.edu>

Hi Karlsuss users

I remember that I reserved Karlsuss today from 3 to 4:30. But I can not use it. 
So please take my time
Sorry!




From ; Chang-Man Park  
Research Associate 
Dept.of Materials Science & Engineering
McCullough Building, Room 205, 476 Lomita Mall, 
Stanford University, Stanford, CA 94305-4045
650-724-4581(Office), 650-725-4034(Fax)
cmpark7 at stanford.edu
cmpark7 at hotmail.com


From pruitt at Stanford.EDU  Mon Feb 12 15:17:40 2001
From: pruitt at Stanford.EDU (Beth Pruitt)
Date: Mon, 12 Feb 2001 15:17:40 -0800 (PST)
Subject: Free 3 to 4:30
In-Reply-To: <002901c09547$66bdb820$8e6a40ab@stanford.edu>
Message-ID: <Pine.GSO.4.31.0102121517330.27046-100000@epic10.Stanford.EDU>

thanks
I'll use it!
beth

On Mon, 12 Feb 2001, Changman Park wrote:

> Hi Karlsuss users
>
> I remember that I reserved Karlsuss today from 3 to 4:30. But I can not use it.
> So please take my time
> Sorry!
>
>
>
>
> >From ; Chang-Man Park
> Research Associate
> Dept.of Materials Science & Engineering
> McCullough Building, Room 205, 476 Lomita Mall,
> Stanford University, Stanford, CA 94305-4045
> 650-724-4581(Office), 650-725-4034(Fax)
> cmpark7 at stanford.edu
> cmpark7 at hotmail.com
>
>



From mahnaz at snf.stanford.edu  Mon Feb 12 16:05:55 2001
From: mahnaz at snf.stanford.edu (Mahnaz Mansourpour)
Date: Mon, 12 Feb 2001 16:05:55 -0800
Subject: up
Message-ID: <3A887A63.67FB9F54@snf.stanford.edu>



Nancy Latta wrote:

> Hi Mahnaz,
>
> This query is from an ex-Stanford staff person who went to MIT about a
> year or so ago.  Can you answer her?  Thanks,
>
>                                 Nancy
>
> ---------- Forwarded message ----------
> Date: Mon, 12 Feb 2001 14:34:54 -0500
> From: Judy L. Hoyt <jlhoyt at mtl.mit.edu>
> To: latta at snf.stanford.edu
> Cc: gpetrich at mit.edu
> Subject: some equipment questions
>
> Nancy,
> One of the optoelectronics groups here is setting up a
> cleanroom for GaAs (and some Si) processing, and
> had some questions that I was hoping you might know
> about.
> Gale Petrich would like to compare the operation and
> performance of the Karl Suess MA-6 vs. the Electronic
> Visions EV620 machines.  Can you comment on these,
> or do you know someone there who can (the staff has
> changed recently so I don't know too many of them
> now).
>
> Thanks,
> Judy
> ps His email is gpetrich at mit.edu (included in the cc)
>
> _______________________________________________________________
> Judy L. Hoyt
> Associate Professor, Electrical Engineering and Computer Science
>
> Room 39-427A                                   |   Office: 617-452-2873
> 60 Vassar Street                                 |  Fax:     617-253-9622
> Massachusetts Institute of Technology  |  Email:  jlhoyt at mtl.mit.edu
> Cambridge, MA  02139                    or:  jlhoyt at mit.edu
>
> Note: please do *not* send email to hoyt at mit.edu
> (that username belongs to another individual at MIT)
>
> _______________________________________________________________

Hello all,

KS is up for top side alignment, when you are unloading the mask, the vacuum
will stay on even if you keep pressing the ENTER button. Release the vacuum
by unplugging the vacuum hose.  Remember to plug the vacuum hose back.  KS
engineer will be back tomorrow to work on the system.

mahnaz



From rjchen at stanford.edu  Mon Feb 12 16:26:44 2001
From: rjchen at stanford.edu (Robert J. Chen)
Date: Mon, 12 Feb 2001 16:26:44 -0800 (PST)
Subject: cancellation
Message-ID: <Pine.GSO.4.31.0102121624140.14702-100000@saga6.Stanford.EDU>

I'm cancelling my 5:30-7 time slot. Sorry for the late notice; I thought
the KS would remain down through today so I didn't bother removing my
reservation earlier...

-Robert Chen




From dcchu at stanford.edu  Mon Feb 12 18:38:44 2001
From: dcchu at stanford.edu (Dachen Chu)
Date: Mon, 12 Feb 2001 18:38:44 -0800 (PST)
Subject: Karlsuss is down again
Message-ID: <Pine.GSO.4.31.0102121835510.14857-100000@elaine14.Stanford.EDU>

The mask was dropped when I tried to load wafer. Seems the old problem
shows up again.

Dachen



From mahnaz at snf.stanford.edu  Thu Feb 15 08:22:04 2001
From: mahnaz at snf.stanford.edu (Mahnaz Mansourpour)
Date: Thu, 15 Feb 2001 08:22:04 -0800
Subject: [Fwd: help]
Message-ID: <3A8C022C.D51207FF@snf.stanford.edu>

Hello all,

Just to give you an update on the KS. We are trying to bring up the
system as quickly as possible.

mahnaz
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From mahnaz at snf.stanford.edu  Thu Feb 15 08:46:51 2001
From: mahnaz at snf.stanford.edu (Mahnaz Mansourpour)
Date: Thu, 15 Feb 2001 08:46:51 -0800
Subject: reservation canceled
Message-ID: <3A8C07FB.492D93FB@snf.stanford.edu>


10 to 11;30 is free on KS.
mahnaz



From ctull at photonimaginginc.com  Thu Feb 15 08:59:23 2001
From: ctull at photonimaginginc.com (Carolyn Tull)
Date: Thu, 15 Feb 2001 08:59:23 -0800
Subject: cancel 12-2
Message-ID: <00e801c09770$a5de1420$c22a1018@wntck1.sfba.home.com>

I am cancelling my karlsuss reserv. today from 12-2 since I 
don't know if the machine will be running properly or not
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From pruitt at stanford.edu  Fri Feb 16 15:38:33 2001
From: pruitt at stanford.edu (Beth Pruitt)
Date: Fri, 16 Feb 2001 15:38:33 -0800 (PST)
Subject: free until 1700
Message-ID: <Pine.GSO.4.31.0102161537570.22060-100000@epic10.Stanford.EDU>

finished early, seems to be working pretty well.
beth



From eap at gloworm.Stanford.EDU  Sun Feb 18 11:33:55 2001
From: eap at gloworm.Stanford.EDU (Eric Perozziello)
Date: Sun, 18 Feb 2001 11:33:55 -0800 (PST)
Subject: My reservation for today 18-FEB)
Message-ID: <200102181933.LAA27707@gloworm.Stanford.EDU>


I have two reservations on the Suss today.  I won't make the 
first one.  I will try to make the second one.  (Coral will not
come up, so I can't tell you the exact times)

Thanks,
-Eric


From mahnaz at snf.stanford.edu  Wed Feb 21 15:52:11 2001
From: mahnaz at snf.stanford.edu (Mahnaz Mansourpour)
Date: Wed, 21 Feb 2001 15:52:11 -0800
Subject: vendor visit
Message-ID: <3A9454AB.2698114E@snf.stanford.edu>

Kyle from KS will be here at 5 to put in the part and work on the
system. Sorry for the late notice, I need to cancel your reservation.

mahnaz



From dcaudillo at worldnet.att.net  Thu Feb 22 09:24:50 2001
From: dcaudillo at worldnet.att.net (David Caudillo-Malik)
Date: Thu, 22 Feb 2001 09:24:50 -0800
Subject: Karlsuss cancellation 2/22 time 12:00 -13:30
Message-ID: <000701c09cf4$6a1b4820$4a3a480c@pavilion>


David Caudillo




From sthansen at stanford.edu  Thu Feb 22 16:23:44 2001
From: sthansen at stanford.edu (Sean T. Hansen)
Date: Thu, 22 Feb 2001 16:23:44 -0800 (PST)
Subject: reservation cancelled
Message-ID: <Pine.GSO.4.31.0102221622220.25744-100000@saga3.Stanford.EDU>

I have cancelled my reservation from 7-9 PM tonight on Karl Suss because I
will not have my mask ready by then.  Sorry for the late notice.
-Sean Hansen




From mahnaz at snf.stanford.edu  Fri Feb 23 13:07:09 2001
From: mahnaz at snf.stanford.edu (Mahnaz Mansourpour)
Date: Fri, 23 Feb 2001 13:07:09 -0800
Subject: KS time avaliable
Message-ID: <3A96D0FD.70F19656@snf.stanford.edu>

A remote user canceled their reservation from 2-4 this afternoon. sorry
for the late notice, I did not get to that email till now.

mahnaz



From Spotworthy at aol.com  Fri Feb 23 17:58:38 2001
From: Spotworthy at aol.com (Spotworthy at aol.com)
Date: Fri, 23 Feb 2001 20:58:38 EST
Subject: can't use my reservation Sat morning
Message-ID: <85.74dff0e.27c86f4e@aol.com>

it was from 9-11 or 10-12.  Anyways, I can't use it but I don't have remote 
access so I can't remove my reservation.  Please feel free to use my time 
slot.

Linda W.


From mbadi at relgyro.Stanford.EDU  Mon Feb 26 11:40:14 2001
From: mbadi at relgyro.Stanford.EDU (Mohammed H. Badi)
Date: Mon, 26 Feb 2001 11:40:14 -0800 (PST)
Subject: reservation cancelled: 12-1:30
Message-ID: <Pine.SOL.3.95.1010226113924.18667B-100000@relgyro.Stanford.EDU>

this is really late notice and i apologise.  i messed up on something so
can't expose today.


moe.			
			
--------
Mohammed H. Badi		
650-906-0663	



From sjlee at snf.stanford.edu  Wed Feb 28 17:30:57 2001
From: sjlee at snf.stanford.edu (sjlee at snf.stanford.edu)
Date: Wed, 28 Feb 2001 17:30:57 -0800
Subject: karlsuss
Message-ID: <OE33RPQIWDO3hRDT6Z300000af1@hotmail.com>

Hi,

Apparently several people have been suffering this problem of unstable
focusing on karlsuss.  The problem wiped out a few wafers of mine today.
Different theories on whether it's just unstable focusing or the more
serious problem of unstable positioning...

If someone finds that this has been resolved, could you please
broadcast?  With evalign also down, the reservation backup is obviously
very extensive.

Thanks.
-John