Mahnaz Mansourpour mahnaz at snf.stanford.edu
Mon Feb 12 16:05:55 PST 2001

Nancy Latta wrote:

> Hi Mahnaz,
> This query is from an ex-Stanford staff person who went to MIT about a
> year or so ago.  Can you answer her?  Thanks,
>                                 Nancy
> ---------- Forwarded message ----------
> Date: Mon, 12 Feb 2001 14:34:54 -0500
> From: Judy L. Hoyt <jlhoyt at mtl.mit.edu>
> To: latta at snf.stanford.edu
> Cc: gpetrich at mit.edu
> Subject: some equipment questions
> Nancy,
> One of the optoelectronics groups here is setting up a
> cleanroom for GaAs (and some Si) processing, and
> had some questions that I was hoping you might know
> about.
> Gale Petrich would like to compare the operation and
> performance of the Karl Suess MA-6 vs. the Electronic
> Visions EV620 machines.  Can you comment on these,
> or do you know someone there who can (the staff has
> changed recently so I don't know too many of them
> now).
> Thanks,
> Judy
> ps His email is gpetrich at mit.edu (included in the cc)
> _______________________________________________________________
> Judy L. Hoyt
> Associate Professor, Electrical Engineering and Computer Science
> Room 39-427A                                   |   Office: 617-452-2873
> 60 Vassar Street                                 |  Fax:     617-253-9622
> Massachusetts Institute of Technology  |  Email:  jlhoyt at mtl.mit.edu
> Cambridge, MA  02139                    or:  jlhoyt at mit.edu
> Note: please do *not* send email to hoyt at mit.edu
> (that username belongs to another individual at MIT)
> _______________________________________________________________

Hello all,

KS is up for top side alignment, when you are unloading the mask, the vacuum
will stay on even if you keep pressing the ENTER button. Release the vacuum
by unplugging the vacuum hose.  Remember to plug the vacuum hose back.  KS
engineer will be back tomorrow to work on the system.


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