From djackrel at stanford.edu  Wed Oct  3 23:14:43 2001
From: djackrel at stanford.edu (David Bryan Jackrel)
Date: Wed, 3 Oct 2001 23:14:43 -0700 (PDT)
Subject: removed reservation, 10/04, 0:00-1:30
Message-ID: <Pine.GSO.4.33.0110032313460.2956-100000@elaine42.Stanford.EDU>

sorry for the late notice...

\\o\\o\\o\\o\\o\\o\\o\\o\\o\\o\\o\\o\\o\\o\\o\\o\\o\\o\\o\\o\\o\\o\\o\\o\\o\\
David Jackrel						djackrel at stanford.edu
Stanford University
Dept. of Materials Science and Eng.
CIS-X, room. B113-2
(650)725-7699



From Spotworthy at aol.com  Thu Oct  4 23:38:29 2001
From: Spotworthy at aol.com (Spotworthy at aol.com)
Date: Fri, 5 Oct 2001 02:38:29 EDT
Subject: friday 7-8:30AM reservation cancelled
Message-ID: <9a.1ac8e2df.28eeaf65@aol.com>

I have to rework my wafers. Sorry for late notice.
Linda W.


From rjchen at stanford.edu  Thu Oct 11 18:07:56 2001
From: rjchen at stanford.edu (Robert J. Chen)
Date: Thu, 11 Oct 2001 18:07:56 -0700 (PDT)
Subject: problem
Message-ID: <Pine.GSO.4.33.0110111753020.19882-100000@saga6.Stanford.EDU>

The 4" chuck seems to be loading wafers unevenly (possibly a problem with
the WEC). Under alignment check (both hard and vac contact), the wafer and
mask can be brought to focus in the same plane with the left microscope head
but not with the right. Apparently the wafer or the chuck is not lying
flat with respect to the mask holder.

This problem was first noticed yesterday after it had been taken off
redlight status.






From mahnaz at snf.stanford.edu  Thu Oct 18 16:11:41 2001
From: mahnaz at snf.stanford.edu (Mahnaz Mansourpour)
Date: Thu, 18 Oct 2001 16:11:41 -0700
Subject: [Fwd: parts for you machine]
Message-ID: <3BCF61AC.E92D4510@snf.stanford.edu>

Hello all,

I just received this, I guess the system will be up on Monday hopefully.

mahnaz
-------------- next part --------------
An embedded message was scrubbed...
From: "Ed Williams" <ewilliams at suss.com>
Subject: parts for you machine
Date: Thu, 18 Oct 2001 18:50:58 -0400
Size: 1222
URL: <http://snf.stanford.edu/pipermail/karlsuss/attachments/20011018/c41ae1bb/attachment.mht>