From jenwang at stanford.edu Mon Jun 10 16:46:24 2002 From: jenwang at stanford.edu (Jen-Shiang Wang) Date: Mon, 10 Jun 2002 16:46:24 -0700 Subject: Karlsuss reservation cancelled from 18:00 to 20:00 Message-ID: <00e301c210d9$08113bd0$1c5640ab@ganymede> I am not able to use karlsuss from 18:00 to 20:00. Please feel free to take the slot. Jen-Shiang -------------- next part -------------- An HTML attachment was scrubbed... URL: From martinez at snf.stanford.edu Fri Jun 14 15:15:55 2002 From: martinez at snf.stanford.edu (Mike Martinez) Date: Fri, 14 Jun 2002 15:15:55 -0700 Subject: vacuum shutdown Message-ID: <3D0A6B1B.E108F172@snf.stanford.edu> Greetings one & all, The house vacuum system will be shutdown for repairs on Monday June 17th for six hours starting at 8:00 AM. Wafer processing will be really difficult during this time so we suggest waiting until house vacuum is restored. Thanks, Team Litho From caudillo at siliconlight.com Fri Jun 14 17:46:41 2002 From: caudillo at siliconlight.com (David Caudillo) Date: Fri, 14 Jun 2002 17:46:41 -0700 Subject: karlsuss cancellation Sat 0630-0830 Message-ID: <8B91B41B86B7D4118E390003470A02E374F5E1@CRUM> Early Bird Special: Will not need my reservation tomorrow morning. Sat. 6/15 at 0630 to 0830 David Caudillo voicemail: 1-408-541-4954 cell: 1-408-593-4579 Silicon Light Machines 385 Moffett Park Drive Suite 110 Sunnyvale, Ca 94089-1208 From liux at usc.edu Fri Jun 14 22:27:09 2002 From: liux at usc.edu (liux) Date: Fri, 14 Jun 2002 22:27:09 -0700 (PDT) Subject: Reservation cancelled Message-ID: Reservation on Saturday is cancelled. From vlordi at stanford.edu Mon Jun 17 14:36:59 2002 From: vlordi at stanford.edu (Vincenzo Lordi) Date: Mon, 17 Jun 2002 14:36:59 -0700 Subject: cancellation tues 6/18 1100-1300 Message-ID: I canceled my reservation for tomorrow Tues 6/18 1100-1300. From caudillo at siliconlight.com Tue Jun 18 17:00:19 2002 From: caudillo at siliconlight.com (David Caudillo) Date: Tue, 18 Jun 2002 17:00:19 -0700 Subject: karlsuss cancellation 2200-midnight Message-ID: <8B91B41B86B7D4118E390003470A02E374F5E9@CRUM> My parts are not ready. From mahnaz at snf.stanford.edu Wed Jun 26 16:00:09 2002 From: mahnaz at snf.stanford.edu (Mahnaz) Date: Wed, 26 Jun 2002 16:00:09 -0700 Subject: up date Message-ID: <3D1A4779.E7B24DF6@snf.stanford.edu> Hello all, Today the KS rep changed the DVC unit on the ks with a new one this should take care of the flickering and all those little issues we had with BSA. He also found a big tear( which is caused by razor) to the orange ring on the vacuum chuck. I do not think I need to speculate how that could have happened!!! You need to mark your yellow tape and make the holes on a different surface, the glass plate on the chucks are getting damaged and we are not able to replace them and that will have a huge effect on your lithography. I feel this is every ones responsibility. So no wonder we could not get good result with vacuum recipe!!! Today another user complained about residue stuff left on the chuck and actually I have experienced that as well. IT IS USERS RESPONSIBILITY TO CLEAN THE CHUCK WHEN REMOVING THE TAPE, SECONDLY PEOPLE WHOM DO PIECES SHOULD USE THE OTHER CHUCK with the yellow tape. These things are common sense and the rest are huge expense to SNF and long delays to every ones work. mahnaz From martinez at snf.stanford.edu Thu Jun 27 15:15:56 2002 From: martinez at snf.stanford.edu (Mike Martinez) Date: Thu, 27 Jun 2002 15:15:56 -0700 Subject: vac switch Message-ID: <3D1B8E9C.2483E289@snf.stanford.edu> the ma6 has a bad mask vacuum solenoid causing consistant vac pull on the mask holder. the part will be ordered and replaced but in the meantime the system usable by connecting and disconnecting the mask holder vac fitting in order to load and unload masks.