From mahnaz at snf.stanford.edu Thu Sep 2 12:29:57 2004 From: mahnaz at snf.stanford.edu (Mahnaz Mansourpour) Date: Thu, 02 Sep 2004 12:29:57 -0700 Subject: down time Message-ID: <413774B5.10418599@snf.stanford.edu> Hello all, We have decided to send the WEC unit on KS2 to Vermont to get fixed. The procedure including the travel time for the part will take 5 working days. Due to some staff vacation is best to send it out next Tuesday so KS2 will be down tuesday morning. KS will not be switched to deep uv mode on Thursday 9th and 10th of September. We anticipate to get the WEC unit back by 14th. mahnaz From mtang at snf.stanford.edu Mon Sep 13 13:48:00 2004 From: mtang at snf.stanford.edu (Mary Tang) Date: Mon, 13 Sep 2004 13:48:00 -0700 Subject: Cancelled reservation (fwd) Message-ID: <41460780.121AB968@snf.stanford.edu> Subject: cancel of Karlsuss reservation Date: Mon, 13 Sep 2004 13:17:05 -0700 From: Bianxiao Cui To: labmembers at snf.stanford.edu References: 1 Hi, Sorry for the late notice. I have to cancel my Karlsuss this afternoon from 2:30-4:00. Bianxiao -------------- next part -------------- An embedded message was scrubbed... From: Bianxiao Cui Subject: cancel of Karlsuss reservation Date: Mon, 13 Sep 2004 13:17:05 -0700 Size: 1114 URL: From ginel at stanford.edu Tue Sep 14 21:18:37 2004 From: ginel at stanford.edu (Ginel Hill) Date: Tue, 14 Sep 2004 21:18:37 -0700 (PDT) Subject: cancelled reservation noon-2pm Weds Message-ID: Wafers not ready - karlsuss for you! From mahnaz at snf.stanford.edu Thu Sep 16 11:34:16 2004 From: mahnaz at snf.stanford.edu (Mahnaz Mansourpour) Date: Thu, 16 Sep 2004 11:34:16 -0700 Subject: DUV Message-ID: <4149DCA8.E1FB2006@snf.stanford.edu> Hello all I am sorry for all the confusion, we will not switch the the KS to DUV due to not getting the WEC unit back for KS2. I can not have both system down at the same time. mahnaz From mahnaz at snf.stanford.edu Tue Sep 21 16:47:38 2004 From: mahnaz at snf.stanford.edu (Mahnaz Mansourpour) Date: Tue, 21 Sep 2004 16:47:38 -0700 Subject: up date Message-ID: <4150BD9A.60688230@snf.stanford.edu> Hello all, I did some testing this morning on KS2, Here is the result: I was not able to resolve 3.5 um and smaller in hard contact. I did resolve 1.5 um with vacuum contact. Meanwhile a student reported some focus issues with the BSA on KS2. I have requested for KS rep to come in and test the system both in top and bottom mode . He will be here on Thursday 23rd. Let me know of any other issues or problems. please use the system for top side and if you need to resolve 3 um and less use Vacuum contact mode. KS1 will get switch to DUV mode on Thursday morning 23rd the " Mask Holder vacuum connector" is loose - I have ordered the part. Do not pull or bent the line, there is a possibility of loss of vacuum. mahnaz -------------- next part -------------- An HTML attachment was scrubbed... URL: From ataerhan at yahoo.com Wed Sep 22 12:24:45 2004 From: ataerhan at yahoo.com (Erhan Ata) Date: Wed, 22 Sep 2004 12:24:45 -0700 (PDT) Subject: 14:30-16:00 KS Reservation cancelled Message-ID: <20040922192445.27568.qmail@web61106.mail.yahoo.com> ===== From dcaudillo at att.net Mon Sep 27 09:58:07 2004 From: dcaudillo at att.net (David Caudillo) Date: Mon, 27 Sep 2004 09:58:07 -0700 Subject: Karlsuss avail. 1230-1430 Message-ID: <000801c4a4b3$2dcfa260$33c2480c@pavilion> Wafers are not ready. Monday: Sept 27,04 From:12:30 to 14:30 -------------- next part -------------- An HTML attachment was scrubbed... URL: