mahnaz at snf.stanford.edu
Tue Sep 21 16:47:38 PDT 2004
I did some testing this morning on KS2, Here is the result:
I was not able to resolve 3.5 um and smaller in hard contact.
I did resolve 1.5 um with vacuum contact.
Meanwhile a student reported some focus issues with the BSA on KS2.
I have requested for KS rep to come in and test the system both in top
and bottom mode . He will be here on Thursday 23rd. Let me know of any
other issues or problems.
please use the system for top side and if you need to resolve 3 um and
less use Vacuum contact mode.
KS1 will get switch to DUV mode on Thursday morning 23rd the " Mask
Holder vacuum connector" is loose - I have ordered the part. Do not pull
or bent the line, there is a possibility of loss of vacuum.
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