alignment marks sizes
Matt Hopcroft
hopcroft at snf.stanford.edu
Mon Jul 18 19:34:47 PDT 2005
Have a look at the SNF website, click on Processes. There is a
page with contact alignment files that you can download.
http://snf.stanford.edu/Process/Masks/ContactAlignMks.html
Lots of other useful information is also on the website.
-Matt Hopcroft
hopcroft at snf.stanford.edu
On Fri, 15 Jul 2005, Thomas E. Jerde wrote:
> I am making a design for a mask and I need to know approximately what
> size the alignment marks should be for use on karlsuss. I have a
> good idea what they should look like, and how successively smaller
> sizes are useful, but I have no scale info about what diameter the
> largest mark should be.
>
> I'd really appreciate any info!
>
> Thanks,
> thomas
> tjerde at stanford.edu
>
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