mahnaz at stanford.edu
Mon Apr 3 09:51:03 PDT 2006
Here is the test Uija did on Friday, I thought to pass the info along.
Here are the qual I did on Friday.
K1 - 1 um 3612 resist
Hard contact - 1.5 um line/space all cleared (looks so
Vac. Contact - 1.0 um space/line all cleared(perfect)
K2 Hard contact - T(2.5um L/S)
Vac Contact - all locations 1 um L/S all cleared
Vac contact looks so nice
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