From mahnaz at stanford.edu Fri Dec 1 15:46:41 2006 From: mahnaz at stanford.edu (Mahnaz Mansourpour) Date: Fri, 01 Dec 2006 15:46:41 -0800 Subject: Solid chuck Message-ID: <4570BEE1.3010602@stanford.edu> Hello all, The solid vacuum chuck has been fixed, please give it a try and see how would work for you. I have used it without any problem. mahnaz From auprabhu at yahoo.com Tue Dec 5 08:09:13 2006 From: auprabhu at yahoo.com (prabhu arumugam) Date: Tue, 5 Dec 2006 08:09:13 -0800 (PST) Subject: karlsuss free 9.00-10.00. finished early Message-ID: <20061205160913.33152.qmail@web60811.mail.yahoo.com> ____________________________________________________________________________________ Do you Yahoo!? Everyone is raving about the all-new Yahoo! Mail beta. http://new.mail.yahoo.com From mahnaz at stanford.edu Tue Dec 5 11:46:54 2006 From: mahnaz at stanford.edu (Mahnaz Mansourpour) Date: Tue, 05 Dec 2006 11:46:54 -0800 Subject: Inconsistent exposure In-Reply-To: <20061204184322.6359C4CD21@smtp3.stanford.edu> References: <20061204184322.6359C4CD21@smtp3.stanford.edu> Message-ID: <4575CCAE.6010502@stanford.edu> Hello all, Uija ran test this morning and everything looks very good. mahnaz Arash Hazeghi wrote: >Nah, mask was brand new, I was using 1.7um with 1.6sec exposure time > >Arash > >-----Original Message----- >From: Mahnaz Mansourpour [mailto:mahnaz at stanford.edu] >Sent: Monday, December 04, 2006 9:03 AM >To: Arash Hazeghi; uyoon at snf.stanford.edu >Subject: Re: Inconsistent exposure > >Arash Hazeghi wrote: > > > >>Hi, >>I exposed a number a wafers (1.7um 3612) resist using Karlsuss (exp. Time >>1.6sec) The first wafer that I inspected after development came out OK and >> >> >I > > >>didn't check the rest, today I noted the 5/7 wafers were exposed improperly >>(looks like underexpose finer features did not come out). I wonder what >> >> >went > > >>wrong? >> >>Thanks, >>Arash >> >> >> >> >Hi Arash, > >The system just has the major pm done on it. Uija and I ran quiet few >wafers and we were able to resolve 1 um with no problem. >what are the fine features size wise? could it be that the mask got dirty? > >mahnaz > > > > -------------- next part -------------- An HTML attachment was scrubbed... URL: From cm_Richter at att.net Wed Dec 6 19:55:03 2006 From: cm_Richter at att.net (cm_Richter at att.net) Date: Thu, 07 Dec 2006 03:55:03 +0000 Subject: Karl Suss: Cancelled Reservation Thursday 12pm-2pm Message-ID: <120720060355.26220.457790970001DED00000666C21602807489D0A9B080C07ADA1030C@att.net> I noticed the Karl Suss reservations looked a little tight for tomorrow.