From mahnaz at snf.stanford.edu  Tue Jan  3 16:30:56 2006
From: mahnaz at snf.stanford.edu (Mahnaz Mansourpour)
Date: Tue, 03 Jan 2006 16:30:56 -0800
Subject: up date
Message-ID: <43BB1740.90303@snf.stanford.edu>


Hello all,

Happy new year

I tested both system
1 um resist in Hard contact  i was able to resolve  1 um  on top and 
flat , 1.5 um on left and right side but minimum 3.5 was resolved in the 
center  ( ks2).
with the same condition as above  in lowvac  1.5/1.0 um resolved across 
wafer ( ks2).

Ks  with 1.6 um resist in hard contact 1.5 um was resolved across the wafer.

mahnaz