Changed Lamp Settings!!

Mary Tang mtang at
Mon Jul 3 11:10:26 PDT 2006

Dear Karlsuss users:

Some time between last Thursday evening and this morning, it would 
appear that the lamp settings on karlsuss2 were changed from the 
standard 15 mW/cm2 and 30 mW/cm2 in Channels 1 and 2, respectively, to 
6.5 and 9.  This could result in underexposure for anyone using the 
system during this time -- hopefully, no one's wafers were adversely 

According to the operating procedures, you should check the lamp 
settings during startup.  See:

If they are not what you expect, please, please, please make a note of 
it on Coral.  In this case, it should have been noted as a problem, so 
that the system would be yellow-lighted.  This way, the system could 
still be used, but anyone using it would have been warned of the change 
in lamp power (and could adjust exposure time accordingly).  Moreover, 
this would let Mario and Changyol know to readjust this to the correct 

There is now, by the way, a cover plate over the lamp housing on 
karlsuss2 where the settings are located.  This was installed to prevent 
accidental adjustment of the settings (as these are conveniently located 
at kicking height under the table.)  Now...  Either someone deliberately 
removed the cover plate and made adjustments, or the system did it by 
itself.  In either case, please be aware that this happened and unless 
we have a confirmed cauase, that this may very well happen again.  
Everyone:  Please be on the lookout.

Thanks for your attention --


Mary X. Tang, Ph.D.
Stanford Nanofabrication Facility
CIS Room 136, Mail Code 4070
Stanford, CA  94305
mtang at

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