From mtang at stanford.edu Thu May 11 11:46:27 2006 From: mtang at stanford.edu (Mary Tang) Date: Thu, 11 May 2006 11:46:27 -0700 Subject: Important: For Deep UV Users Message-ID: <44638683.6000105@stanford.edu> Hello, deep-UV users: As I trust you are aware, there are costs associated with changing over to deep-UV mode and back. There is Mario's time (about two hours). There is visible wear and tear on parts which do not like to be handled, however carefully (mainly, the very expensive optics.) And there is opportunity cost, when the machine is not being used. This is especially annoying for non-DUV users on a busy litho day when the machine is sitting idle in the DUV mode. And, as you might guess, it is annoying to everyone when the machine is placed in DUV mode and no one shows up to use it. And so, I would like to also lay out (and remind everyone of) the following hard rules: 1. Requests for DUV must be made at least one week in advance. Staff will not bump other labmembers' reservations to accomodate DUV requests. 2. DUV processing will be done on Tuesdays, with available processing time from roughly 10 am - 2 pm. 3. If you need DUV less than one week in advance or at times other than listed above, you must make your request through Paul Rissman or me, NOT to Mario, Mahnaz, or Uija. We would like to try to minimize the number of DUV conversions and encourage DUV users to work together to coordinate processing. Please communicate with a problem that the system is underutilized in DUV mode, we will institute recharging DUV users for staff time for DUV set up. We will certainly work with you to accomodate any special needs you may have, but please understand that that there are costs associated with DUV use, both in terms of staff time and availability for others. Thanks for your attention -- Mary -- Mary X. Tang, Ph.D. Stanford Nanofabrication Facility CIS Room 136, Mail Code 4070 Stanford, CA 94305 (650)723-9980 mtang at stanford.edu http://snf.stanford.edu From mager at stanford.edu Thu May 25 11:48:26 2006 From: mager at stanford.edu (Morgan Mager) Date: Thu, 25 May 2006 11:48:26 -0700 Subject: Slot released today 2-4pm Message-ID: <1148582906.4475fbfac3e03@webmail.stanford.edu> Sorry for the late notice.