From mahnaz at stanford.edu Wed Nov 8 11:17:17 2006 From: mahnaz at stanford.edu (Mahnaz Mansourpour) Date: Wed, 08 Nov 2006 11:17:17 -0800 Subject: WEC Message-ID: <45522D3D.9010706@stanford.edu> Hello all, It seems that we are having this intermittent problem with Z motor getting stuck and if not taken care of , it can cause severs damage to the WEC which is a quiet expensive part of the system. So if get stuck do not try to fix it or even mess with it. I had asked for the system to be yellow light but I do not see that. I have called KS and they will send some one next week to do a major PM on the system As soon as scheduled; I will send out a note and let you know till then ..... PLEASE BE KIND TO THE SYSTEM. mahnaz From mahnaz at stanford.edu Fri Nov 10 15:57:34 2006 From: mahnaz at stanford.edu (Mahnaz Mansourpour) Date: Fri, 10 Nov 2006 15:57:34 -0800 Subject: up date Message-ID: <455511EE.5070904@stanford.edu> Hello all, As you know, we have been having some over current error with ks1 and usually my experience shows that this error can cause severe problems. I have asked KS to come and do a pm on the ks1 and Mario had noticed that some of the problem might have come from the Z micrometer. I have asked for a quote on that part and asked them to come in when I have the part some times next week. I also have asked them to bring the test mask and test both system for the top to bottom alignment. As soon as I hear from them, I will communicate with you all. Till then, please if you encounter problem with KS with over current or wec error please shut down the system. Secondly, we have managed to get a coated mirror for KS2 that should improve the uniformity of the exposure on KS2. Mario will put in next time when he will do the lamp change. Cheers mahnaz From mahnaz at stanford.edu Wed Nov 15 14:40:31 2006 From: mahnaz at stanford.edu (Mahnaz Mansourpour) Date: Wed, 15 Nov 2006 14:40:31 -0800 Subject: DUV Message-ID: <455B975F.6080300@stanford.edu> Hello all, If everything works as planned, we like to switch the KS1 to DUV mode on Monday 20th at 3 pm and switch back to I line mode at 7 am on Tuesday ( next day). mahnaz From mahnaz at stanford.edu Mon Nov 20 14:41:06 2006 From: mahnaz at stanford.edu (Mahnaz Mansourpour) Date: Mon, 20 Nov 2006 14:41:06 -0800 Subject: DUV Message-ID: <45622F02.4070208@stanford.edu> Hello all, System will switch to DUV as I am writing this email till tomorrow morning 8 Am. Mahnaz/Mario From mahnaz at stanford.edu Wed Nov 29 13:21:18 2006 From: mahnaz at stanford.edu (Mahnaz Mansourpour) Date: Wed, 29 Nov 2006 13:21:18 -0800 Subject: update Message-ID: <456DF9CE.2060203@stanford.edu> Hello all, Karlsuss1 As you know, major Pm was done on the system yesterday. Uija checked the system again today wafers look beautiful , I have asked her to save the wafer in a box next to the tool for reference so when you get a chance take a look at it and please put it back in the box. 1 um L/S on the wafer resolved every where. The wafer has 1 um of 3612 and exposure is 1 second. Exposure is back where always has been. Run a test wafer before committing all your wafers. And please do not fiddle with the system if there is an issue let us know about it through commenting or yellow lighting the system. mahnaz -------------- next part -------------- An HTML attachment was scrubbed... URL: From mahnaz at stanford.edu Thu Nov 30 11:50:15 2006 From: mahnaz at stanford.edu (Mahnaz Mansourpour) Date: Thu, 30 Nov 2006 11:50:15 -0800 Subject: Chuck Message-ID: <456F35F7.5060903@stanford.edu> Hello all, I thought to et you know that I have taken the solid chuck out of the lab and I am trying to fix the problem . This is the chuck which give vacuum error and I figured out why? Some one had taken the liberty to draw a line on the quartz ( very bad thing to do) and now there were two edges to be used as flat finder, I am trying to correct and save this very expensive chuck. I am hoping to get it back by tomorrow. mahnaz From chi.on.chui at intel.com Thu Nov 30 12:03:19 2006 From: chi.on.chui at intel.com (Chui, Chi On) Date: Thu, 30 Nov 2006 12:03:19 -0800 Subject: 2-4pm today reservation released Message-ID: Sorry for late action due to no access to Remote Coral. /Chi On -------------- next part -------------- An HTML attachment was scrubbed... URL: