mahnaz at stanford.edu
Wed Nov 29 13:21:18 PST 2006
As you know, major Pm was done on the system yesterday. Uija checked
the system again today wafers look beautiful , I have asked her to save
the wafer in a box next to the tool for reference so when you get a
chance take a look at it and please put it back in the box.
1 um L/S on the wafer resolved every where. The wafer has 1 um of 3612
and exposure is 1 second.
Exposure is back where always has been. Run a test wafer before
committing all your wafers.
And please do not fiddle with the system if there is an issue let us
know about it through commenting or yellow lighting the system.
-------------- next part --------------
An HTML attachment was scrubbed...
More information about the karlsuss