exposure time

[bli003 at student.ucr.edu]

Hello All,

Dose anyone use Karlsuss 2 recently to expose 1.6um 3612 photoresist on small feature(~1um)? How long to expose to get a good result?

I tried 1.6,1.8,1.9,and 2.0sec exposure, but results are either underexposed or overexposed. Really confused.

Thank you,
Bei