exposure time

bli003 at student.ucr.edu bli003 at student.ucr.edu
Sun Oct 22 13:52:26 PDT 2006

Hello All,

Dose anyone use Karlsuss 2 recently to expose 1.6um 3612 photoresist on small feature(~1um)? How long to expose to get a good result?

I tried 1.6,1.8,1.9,and 2.0sec exposure, but results are either underexposed or overexposed. Really confused.

Thank you,

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