resolution

Mahnaz Mansourpour mahnaz at stanford.edu
Fri Apr 11 15:23:29 PDT 2008


Hello all,

Few of you reported bad result.
The lamp has been changed and I  ran a 1 um 3612  at 1.1 second of 
exposure,  1 um line and space was resolved across the wafer. Looked 
beautiful.
Happy processing.
mahnaz




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