From mzi9890 at yahoo.com  Sat Mar  1 21:19:57 2008
From: mzi9890 at yahoo.com (Mohammed Islam)
Date: Sat, 1 Mar 2008 21:19:57 -0800 (PST)
Subject: Could someone please yellow light karlsuss
Message-ID: <701191.5258.qm@web83513.mail.sp1.yahoo.com>

Karlsuss was redlighted on Friday becuase of xy error
and microscope movement jamming. It seems to be in
normal state right now. There is no error on the 
screen and microscope movement is fine. Microscope
up/down jamming is a frequent problem, it needs a 
little help by pushing it towards the direction of 
movement to unstuck the movement. Could someone please
yellow light the tool. I will redlight it if the 
problem comes up again but I am very positive the 
machine is fine now. I can really use it on now.

Thanks
Mohammed


From ahazeghi at stanford.edu  Tue Mar  4 17:34:55 2008
From: ahazeghi at stanford.edu (Arash Hazeghi)
Date: Tue, 4 Mar 2008 17:34:55 -0800
Subject: 1.6um resist exposure time
Message-ID: <023201c87e61$1d7985d0$586c9170$@edu>

Hi,

 

What is the current exposure time recommended for 1.6um 3612 resist for
Karlsuss? 

 

 

 

Thanks,

 

Arash

 

 

 

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From ahazeghi at stanford.edu  Thu Mar  6 12:30:02 2008
From: ahazeghi at stanford.edu (Arash Hazeghi)
Date: Thu, 6 Mar 2008 12:30:02 -0800
Subject: 1.6um resist exposure time
In-Reply-To: <20080306103710.BTT42992@smh.ucr.edu>
References: <20080306103710.BTT42992@smh.ucr.edu>
Message-ID: <02bb01c87fc8$db18ee10$914aca30$@edu>

Bei,
Based on the recommendation from other users I used 1.6sec + 90sec post bake
@115C. patterns came out good.

Thanks,
Arash

-----Original Message-----
From: bli003 at student.ucr.edu [mailto:bli003 at student.ucr.edu] 
Sent: Thursday, March 06, 2008 10:37 AM
To: Arash Hazeghi
Subject: Re: 1.6um resist exposure time

Hi Arash,

I have the same question about the exposure time.
What's the response you got from other users?

Thank you,
Bei

---- Original message ----
>Date: Tue, 4 Mar 2008 17:34:55 -0800
>From: "Arash Hazeghi" <ahazeghi at stanford.edu>  
>Subject: 1.6um resist exposure time  
>To: <karlsuss at snf.stanford.edu>
>
>   Hi,
>
>    
>
>   What is the current exposure time recommended for
>   1.6um 3612 resist for Karlsuss?
>
>    
>
>    
>
>    
>
>   Thanks,
>
>    
>
>   Arash
>
>    
>
>    
>
>    
==============================
Graduate Student
QSL Lab.,EngrII 228
Dept.of Electrical Engineering
University of California
Riverside, CA 92521
Ph.# (951) 827-6275
Fax# (951) 827-2425
http://qsl.ee.ucr.edu/
==============================



From mahnaz at stanford.edu  Mon Mar 17 17:47:30 2008
From: mahnaz at stanford.edu (Mahnaz Mansourpour)
Date: Mon, 17 Mar 2008 17:47:30 -0700
Subject: update
Message-ID: <47DF1122.3000006@stanford.edu>


Hello all,

The 6 months pm is done, the wec has been rebuild and the power supply 
has been tested and the uniformity test has been  checked.
We ran 1 um 3612 in hard contact and resolved 1.5 um resolution , 
exposure 1 second.
The same test done in vacuum contact and 1 um resolved nicely on all 5 
sites with 1 second of exposure.

Please use the system and let us know if there are any issues.

Mahnaz, Gary, Mario



From mahnaz at stanford.edu  Tue Mar 18 17:05:58 2008
From: mahnaz at stanford.edu (Mahnaz Mansourpour)
Date: Tue, 18 Mar 2008 17:05:58 -0700
Subject: update
Message-ID: <47E058E6.9000001@stanford.edu>


Hello all,

The 6 months pm has been done, The wec has been rebuild and everything 
possibly can be checked on the system has been checked.
I tested the system
In vacuum mode,  1 um 3612 exposure 1 sec. with chuck ( with vacuum 
channel) 1 um was resolved on all 5 sites. The most beautiful wafer I 
have seen in a while.
The same  test ran with the solid quartz chuck was not as good, 1 um 
resolved in two areas but 1.5 um resolved in all 5 sites.
We did find the screw missing and we put it back on the quartz chuck so 
it should behave even better.

Unfortunately both system needs to be tested for back side alignment  
which the mask will arrive tomorrow and he will need time on the 
systems. I was able to make reservation for ks but the ks2 was booked. 
warning that your reservation might get bumped.
 
Please take a minute and thank Gary and Mario and report any problem or 
concern on coral.
If  you all be good and treat the systems well, I might have a nice 
surprise for you all.

mahnaz