mahnaz at stanford.edu
Mon Mar 17 17:47:30 PDT 2008
The 6 months pm is done, the wec has been rebuild and the power supply
has been tested and the uniformity test has been checked.
We ran 1 um 3612 in hard contact and resolved 1.5 um resolution ,
exposure 1 second.
The same test done in vacuum contact and 1 um resolved nicely on all 5
sites with 1 second of exposure.
Please use the system and let us know if there are any issues.
Mahnaz, Gary, Mario
More information about the karlsuss