From erichall at stanford.edu  Tue Sep  9 14:21:49 2008
From: erichall at stanford.edu (Eric Hall)
Date: Tue, 9 Sep 2008 14:21:49 -0700
Subject: 3:30 - 4:30 Reservation Free
Message-ID: <605b98f60809091421i3b92b042q7e88c191852234f6@mail.gmail.com>

I made a reservation for 3:30 - 4:30 PM, but something has come up to
prevent me from using it.  Instrument is now free during that time.

Eric
Coral: erichall
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From mahnaz at stanford.edu  Mon Sep 29 17:59:42 2008
From: mahnaz at stanford.edu (Mahnaz Mansourpour)
Date: Mon, 29 Sep 2008 17:59:42 -0700
Subject: system tested
Message-ID: <48E179FE.1080607@stanford.edu>

I ran 3612  1 um resist and resolved 1 um line and space and 2.5 um squares.
1.1 second exposer in vac. mode.

Also I checked 1 um 3612 total of 10 wafers ran  , looked pretty GOOD, 
thickness has been noted in coral.

mahnaz