system tested

Mahnaz Mansourpour mahnaz at stanford.edu
Mon Sep 29 17:59:42 PDT 2008


I ran 3612  1 um resist and resolved 1 um line and space and 2.5 um squares.
1.1 second exposer in vac. mode.

Also I checked 1 um 3612 total of 10 wafers ran  , looked pretty GOOD, 
thickness has been noted in coral.

mahnaz



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