From mahnaz at stanford.edu  Fri Dec 18 10:56:30 2009
From: mahnaz at stanford.edu (Mahnaz Mansourpour)
Date: Fri, 18 Dec 2009 10:56:30 -0800
Subject: PM
Message-ID: <4B2BD05E.6050700@stanford.edu>


Hi all,

The annual pm has been performed by FSE.
I just ran wafers on the system and looks very good.
I used 1 um of 3612, exposure ( 1.3 seconds, lamp intensity 10.8 mw/cm2  
lamp is 5 weeks old)
I resolved 1 um and 1.5 um on all 5 points.
tested the system for top side and bottom side both, it all  looks good.
There was an issue with right side focus and do not see it  after pm.
We will change the lamp for new year.

mahnaz