PM

Mahnaz Mansourpour mahnaz at stanford.edu
Fri Dec 18 10:56:30 PST 2009


Hi all,

The annual pm has been performed by FSE.
I just ran wafers on the system and looks very good.
I used 1 um of 3612, exposure ( 1.3 seconds, lamp intensity 10.8 mw/cm2  
lamp is 5 weeks old)
I resolved 1 um and 1.5 um on all 5 points.
tested the system for top side and bottom side both, it all  looks good.
There was an issue with right side focus and do not see it  after pm.
We will change the lamp for new year.

mahnaz



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