mahnaz at stanford.edu
Fri Dec 18 10:56:30 PST 2009
The annual pm has been performed by FSE.
I just ran wafers on the system and looks very good.
I used 1 um of 3612, exposure ( 1.3 seconds, lamp intensity 10.8 mw/cm2
lamp is 5 weeks old)
I resolved 1 um and 1.5 um on all 5 points.
tested the system for top side and bottom side both, it all looks good.
There was an issue with right side focus and do not see it after pm.
We will change the lamp for new year.
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