Mylar masks on karlsuss?
ahryciw at stanford.edu
Sat Feb 28 12:11:36 PST 2009
I need to expose some large (10s to 100s of um) features on an SOI piece
fairly quickly. The SNF maskmaking page mentions the possibility of using
mylar transparency masks for quick turnaround on designs with non-critical
features, but I can't seem to find which exposure tools can use such masks.
Is this possible on karlsuss? If so, if anyone could point me to some more
info (or offer personal advice) about making transparency masks for karlsuss
in particular, I would be very grateful!
Dr. Aaron Hryciw
Geballe Laboratory for Advanced Materials
476 Lomita Mall (04-490)
McCullough Building, Rm. 325
Stanford, CA 94305-4045
Tel.: (650) 723-5840
Fax.: (650) 736-1984
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