Facilities work on 5/5/09
Gary J Sosa
gsosa at stanford.edu
Mon May 4 14:59:04 PDT 2009
The facilities group is scheduled to replace some bearings in transfer fan "TF-5" which supplies laminar airflow to the L101 aisle. This is the aisle where ASM stepper, solvent sink and Karl Suss 1 and 2 Aligners are located. The work is scheduled for Tuesday,May 5th starting at 6:30AM and is expected to take 6 hours. During this time there will be no direct control of temperature and humidity. If you have any concerns or are doing critical work, you may want to re-schedule your litho work until after facility group has completed their repairs.
More information about the karlsuss