update

Mahnaz Mansourpour mahnaz at stanford.edu
Wed May 5 17:17:25 PDT 2010


Same as before, even FSE is confused. I shot few wafers the ring still 
there. He did find  breakage to the  hose that supplies  vacuum to chuck 
but I guess that was not the issue as much.
Decided back to work on the system tomorrow.

Okay for non critical work.

mahnaz



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