karlsuss2 users: please read

Thomas O'Sullivan tdo at stanford.edu
Thu May 13 11:28:50 PDT 2010

Hi all,
For the past 3 weeks, those of us who work with small pieces have been 
unable to get a good (better than 5um) alginment on karlsuss2.  While 
the mask appears aligned even when in contact (soft vacuum), after 
exposure there is a ~5um random rotation causing an unacceptable 

We are trying to determine if this is a problem with the pieces chuck 

Has anyone experienced this problem when exposing full wafers?  Note the 
shift is on the order of 3-5um, so you may not even notice if you don't 
have that high of an alignment tolerance.


Thomas D. O'Sullivan
Ph.D. Candidate, Electrical Engineering

Center for Integrated Systems
Stanford University
420 Via Palou, CIS-X Room B113
Stanford, CA  94305-4075
o: (650)725-6970 c: (708)261-5383 f: (650)723-4659

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