karlsuss2 users: please read

Thomas O'Sullivan tdo at stanford.edu
Thu May 13 11:28:50 PDT 2010


Hi all,
For the past 3 weeks, those of us who work with small pieces have been 
unable to get a good (better than 5um) alginment on karlsuss2.  While 
the mask appears aligned even when in contact (soft vacuum), after 
exposure there is a ~5um random rotation causing an unacceptable 
misalignment.

We are trying to determine if this is a problem with the pieces chuck 
itself.

Has anyone experienced this problem when exposing full wafers?  Note the 
shift is on the order of 3-5um, so you may not even notice if you don't 
have that high of an alignment tolerance.

Thanks,
Tom


-- 
Thomas D. O'Sullivan
Ph.D. Candidate, Electrical Engineering

Center for Integrated Systems
Stanford University
420 Via Palou, CIS-X Room B113
Stanford, CA  94305-4075
o: (650)725-6970 c: (708)261-5383 f: (650)723-4659
http://snow.stanford.edu/~tdo/




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