From lindaw at snf.stanford.edu Fri Dec 6 06:25:00 2002 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Dec 6, 2002 6:25:00 AM Subject: Problem karlsuss2 2002-12-06 06:24:59: someone has messed with the CI1 setting again Message-ID: lamp test reads CI1 at 7mw/cm2. It should be 15 mw/cm2. System was set up for CI1 when I found it at 6:15 this morning, Friday, Dec. 6th. From vilanova at snf.stanford.edu Fri Dec 6 09:55:56 2002 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Dec 6, 2002 9:55:56 AM Subject: Problem karlsuss2 2002-12-06 06:24:59: someone has messed with the CI1 setting again Message-ID: replaced & calibrated lamp. Please do not change the intensity settings on lamp power supply. Ok to use . From zheng at snf.stanford.edu Tue Dec 10 11:53:21 2002 From: zheng at snf.stanford.edu (zheng at snf.stanford.edu) Date: Dec 10, 2002 11:53:21 AM Subject: Problem karlsuss2 2002-12-10 11:53:09: squzing noises Message-ID: It appears that the x-axis turner would make high pitch noise which mau indicate that the tool need lubrication. From zheng at snf.stanford.edu Tue Dec 10 11:53:14 2002 From: zheng at snf.stanford.edu (zheng at snf.stanford.edu) Date: Dec 10, 2002 11:53:14 AM Subject: Problem karlsuss2 2002-12-10 11:53:09: squzing noises Message-ID: It appears that the x-axis turner would make high pitch noise which mau indicate that the tool need lubrication. From vilanova at snf.stanford.edu Wed Dec 11 08:21:58 2002 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Dec 11, 2002 8:21:58 AM Subject: Shutdown karlsuss2 2002-12-11 08:21:57: work in progress.... Message-ID: From vilanova at snf.stanford.edu Wed Dec 11 09:01:33 2002 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Dec 11, 2002 9:01:33 AM Subject: Problem karlsuss2 2002-12-10 11:53:09: squzing noises Message-ID: Cleaned & lubricated micrometers. From vilanova at snf.stanford.edu Wed Dec 11 09:01:51 2002 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Dec 11, 2002 9:01:51 AM Subject: Shutdown karlsuss2 2002-12-11 08:21:57: work in progress.... Message-ID: cleaned and lubricated micrometer. From erics at snf.stanford.edu Fri Dec 13 01:34:19 2002 From: erics at snf.stanford.edu (erics at snf.stanford.edu) Date: Dec 13, 2002 1:34:19 AM Subject: Problem karlsuss2 2002-12-13 01:34:19: Karl Suss overcurrent Message-ID: I was using the karl suss and the overcurrent setting kicked in. I tried to follow the instructions and it kept on giving me the same error, locking itself into that overcurrent "mode". I wasn't doing anything wierd just some F to B alignment on a 150 micron wafer, any question call me at 408-605-4439 thx, eric s From vilanova at snf.stanford.edu Fri Dec 13 11:07:04 2002 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Dec 13, 2002 11:07:04 AM Subject: Problem karlsuss2 2002-12-13 01:34:19: Karl Suss overcurrent Message-ID: replaced microscope sensors, tested , working ok, ready to use. From kjliu at snf.stanford.edu Fri Dec 13 11:46:17 2002 From: kjliu at snf.stanford.edu (kjliu at snf.stanford.edu) Date: Dec 13, 2002 11:46:17 AM Subject: Shutdown karlsuss2 2002-12-13 11:46:16: wec overcurrent Message-ID: From martinez at snf.stanford.edu Tue Dec 17 01:41:10 2002 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Dec 17, 2002 1:41:10 PM Subject: Shutdown karlsuss2 2002-12-13 11:46:16: wec overcurrent Message-ID: adj microscope down position. adj microscope limit sensors calibrated wec sensor, set up grab z position, cycled wafers. ready for use