From mislam at snf.stanford.edu Sat Nov 2 09:23:06 2002 From: mislam at snf.stanford.edu (mislam at snf.stanford.edu) Date: Nov 2, 2002 9:23:06 AM Subject: Problem karlsuss2 2002-11-02 09:23:05: Overcurrent Message-ID: Machine showing overcurrent, will not continue. From qwang at snf.stanford.edu Sat Nov 2 02:17:35 2002 From: qwang at snf.stanford.edu (qwang at snf.stanford.edu) Date: Nov 2, 2002 2:17:35 PM Subject: Problem karlsuss2 2002-11-02 14:17:34: lost vaccum Message-ID: From vilanova at snf.stanford.edu Mon Nov 4 07:54:31 2002 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Nov 4, 2002 7:54:31 AM Subject: Problem karlsuss2 2002-11-02 09:23:05: Overcurrent Message-ID: machine found on Proximity / proximity Mode. Re-initialized , tested, working ok. From vilanova at snf.stanford.edu Mon Nov 4 07:55:05 2002 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Nov 4, 2002 7:55:05 AM Subject: Problem karlsuss2 2002-11-02 14:17:34: lost vaccum Message-ID: Re-initialized , no vacuum problem found Ok to use From quickwin at snf.stanford.edu Mon Nov 4 09:34:21 2002 From: quickwin at snf.stanford.edu (quickwin at snf.stanford.edu) Date: Nov 4, 2002 9:34:21 PM Subject: Problem karlsuss2 2002-11-04 21:34:19: focus problem Message-ID: I was unable to get both objectives in focus; the electronic control knobs don't seem to respond From vilanova at snf.stanford.edu Tue Nov 5 07:51:32 2002 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Nov 5, 2002 7:51:32 AM Subject: Problem karlsuss2 2002-11-04 21:34:19: focus problem Message-ID: checked top & bottom , left and right and I couldnt find a focus problem. Ok to use . From qwang at snf.stanford.edu Wed Nov 6 06:00:13 2002 From: qwang at snf.stanford.edu (qwang at snf.stanford.edu) Date: Nov 6, 2002 6:00:13 PM Subject: Problem karlsuss2 2002-11-06 18:00:12: microscop down, moving time out Message-ID: From vilanova at snf.stanford.edu Thu Nov 7 07:44:00 2002 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Nov 7, 2002 7:44:00 AM Subject: Problem karlsuss2 2002-11-06 18:00:12: microscop down, moving time out Message-ID: Microscope Sensor Adjusted, tested, working ok ready to use . :-) From cyang at snf.stanford.edu Wed Nov 13 04:33:14 2002 From: cyang at snf.stanford.edu (cyang at snf.stanford.edu) Date: Nov 13, 2002 4:33:14 PM Subject: Problem karlsuss2 2002-11-13 16:33:08: non-uniform exposure Message-ID: From vilanova at snf.stanford.edu Thu Nov 14 08:12:22 2002 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Nov 14, 2002 8:12:22 AM Subject: Problem karlsuss2 2002-11-13 16:33:08: non-uniform exposure Message-ID: I've Exposed A couple of wafers and Uniformity Looks fine, Ok to use . From pindermu at snf.stanford.edu Mon Nov 18 12:22:22 2002 From: pindermu at snf.stanford.edu (pindermu at snf.stanford.edu) Date: Nov 18, 2002 12:22:22 AM Subject: Problem karlsuss2 2002-11-18 00:22:21: Power control is beeping in CP1 Message-ID: From vilanova at snf.stanford.edu Mon Nov 18 09:28:14 2002 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Nov 18, 2002 9:28:14 AM Subject: Problem karlsuss2 2002-11-18 00:22:21: Power control is beeping in CP1 Message-ID: Clean Ellipsoidal Mirror , calibrated lamp, works ok ready to use From kenney at snf.stanford.edu Mon Nov 25 06:04:02 2002 From: kenney at snf.stanford.edu (kenney at snf.stanford.edu) Date: Nov 25, 2002 6:04:02 PM Subject: Problem karlsuss2 2002-11-25 18:04:00: ANTZ!!! Message-ID: I killed over a dozen ants on the machine while using it. These are the small "litho" sized ants. I caught one on the wafer holder plate. Is resist sweet? From vilanova at snf.stanford.edu Tue Nov 26 07:42:31 2002 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Nov 26, 2002 7:42:31 AM Subject: Problem karlsuss2 2002-11-25 18:04:00: ANTZ!!! Message-ID: I think the ants are gone! , because I could,nt find any.