From ethrush at snf.stanford.edu Tue Oct 1 03:26:24 2002 From: ethrush at snf.stanford.edu (ethrush at snf.stanford.edu) Date: Oct 1, 2002 3:26:24 PM Subject: Problem karlsuss2 2002-10-01 15:26:22: mask vacuum Message-ID: The mask vacuum does not seem to be holding. I tried several masks.... From martinez at snf.stanford.edu Tue Oct 1 04:25:57 2002 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Oct 1, 2002 4:25:57 PM Subject: Problem karlsuss2 2002-10-01 15:26:22: mask vacuum Message-ID: tightened mask vac fitting. loaded mask w/no probs. From scheng at snf.stanford.edu Sat Oct 12 05:48:54 2002 From: scheng at snf.stanford.edu (scheng at snf.stanford.edu) Date: Oct 12, 2002 5:48:54 PM Subject: Problem karlsuss2 2002-10-12 17:48:54: WEC overcurrent Message-ID: From vilanova at snf.stanford.edu Mon Oct 14 07:54:51 2002 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Oct 14, 2002 7:54:51 AM Subject: Problem karlsuss2 2002-10-12 17:48:54: WEC overcurrent Message-ID: No overcurrent found after loading mask and exposed wafer Ok to use . From cbellew at snf.stanford.edu Thu Oct 17 10:54:23 2002 From: cbellew at snf.stanford.edu (cbellew at snf.stanford.edu) Date: Oct 17, 2002 10:54:23 PM Subject: Problem karlsuss2 2002-10-17 22:54:21: Repeated overcurrent error Message-ID: Machine kept giving me an overcurrent error. From rfasch at snf.stanford.edu Mon Oct 21 10:14:32 2002 From: rfasch at snf.stanford.edu (rfasch at snf.stanford.edu) Date: Oct 21, 2002 10:14:32 AM Subject: Comment karlsuss2 2002-10-21 10:14:31: overcurrent message Message-ID: hi , i got 4 times overcurrent message, at the moment when the mashine brings the wafer with the mask in contact before alignment cycle. thanks rainer From mahnaz at snf.stanford.edu Mon Oct 21 10:15:20 2002 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Oct 21, 2002 10:15:20 AM Subject: Problem karlsuss2 2002-10-21 10:15:19: overcurrent Message-ID: I am helping reainer and problem keeps ocurring. From martinez at snf.stanford.edu Mon Oct 21 01:27:13 2002 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Oct 21, 2002 1:27:13 PM Subject: Problem karlsuss2 2002-10-21 10:15:19: overcurrent Message-ID: initialized system parameters. tested ok From rfasch at snf.stanford.edu Tue Oct 22 11:57:58 2002 From: rfasch at snf.stanford.edu (rfasch at snf.stanford.edu) Date: Oct 22, 2002 11:57:58 AM Subject: Comment karlsuss2 2002-10-22 11:57:57: low vac contact mode Message-ID: Hi, I used the low vac contact mode. My mask was clean an I baked my wafer 10 min longer at 90 degree to avoid sicking. (1.6 um resist) But after the exposure the wafers sticked on the mask. I think the vaccum is a little bit to high. Could you please adjust it. Thanks -Rainer From mahnaz at snf.stanford.edu Tue Oct 29 04:13:36 2002 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Oct 29, 2002 4:13:36 PM Subject: Problem karlsuss2 2002-10-29 16:13:35: I see some focus problem Message-ID: When focusing on the wafer the focus on the mask goes out From mcconnel at snf.stanford.edu Tue Oct 29 06:50:50 2002 From: mcconnel at snf.stanford.edu (mcconnel at snf.stanford.edu) Date: Oct 29, 2002 6:50:50 PM Subject: Problem karlsuss2 2002-10-29 18:50:49: "machine in dangerous condition" Message-ID: As I was ready to use the KarlSuss this evening, there was a message on the screen that said "the machine is in a dangerous condition." It prompted me to push enter to acknowledge this, so I did, hoping it would solve the problem. However, this led to a series of additional problems it wanted me to deal with and acknowledge. Not knowing what I was doing, I decided it would be best not to proceed. I'm not sure what caused the machine to become like this; as I said, it was this way when I walked up to it so I really don't know what happened. From vilanova at snf.stanford.edu Wed Oct 30 07:47:29 2002 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Oct 30, 2002 7:47:29 AM Subject: Problem karlsuss2 2002-10-29 16:13:35: I see some focus problem Message-ID: I couldnt repeat the focus problem. machine was found in serious condition due to a power failure ( I found must of the equipment turned off) . I've tested it and is working ok . ready to use . From vilanova at snf.stanford.edu Wed Oct 30 07:49:05 2002 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Oct 30, 2002 7:49:05 AM Subject: Problem karlsuss2 2002-10-29 18:50:49: "machine in dangerous condition" Message-ID: Power failure problem , re-initialized , working ok