Comment karlsuss2 2002-10-21 10:14:31: overcurrent message

rfasch at snf.stanford.edu rfasch at snf.stanford.edu
Mon Oct 21 10:14:32 PDT 2002


hi ,
i got 4 times overcurrent message, at the moment when the mashine brings the wafer with the mask in contact before alignment cycle.
thanks
rainer




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