From martinez at snf.stanford.edu  Mon Sep 16 01:32:41 2002
From: martinez at snf.stanford.edu (martinez at snf.stanford.edu)
Date: Sep 16, 2002 1:32:41 PM
Subject: Shutdown karlsuss2 2002-09-16 13:32:40: illuminator problem
Message-ID: <mailman.0.1356281956.4015.karlsuss2-pcs@snf.stanford.edu>




From martinez at snf.stanford.edu  Wed Sep 18 02:30:19 2002
From: martinez at snf.stanford.edu (martinez at snf.stanford.edu)
Date: Sep 18, 2002 2:30:19 PM
Subject: Shutdown karlsuss2 2002-09-16 13:32:40: illuminator problem
Message-ID: <mailman.1.1356281956.4015.karlsuss2-pcs@snf.stanford.edu>

replaced ellipsoidal mirror, calibrated new lamp.
ready for use



From lindaw at snf.stanford.edu  Thu Sep 19 11:31:46 2002
From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu)
Date: Sep 19, 2002 11:31:46 AM
Subject: Comment karlsuss2 2002-09-19 11:31:46: after exp, get mask vac error, but mask is fine
Message-ID: <mailman.2.1356281956.4015.karlsuss2-pcs@snf.stanford.edu>




From swcha at snf.stanford.edu  Wed Sep 25 09:57:37 2002
From: swcha at snf.stanford.edu (swcha at snf.stanford.edu)
Date: Sep 25, 2002 9:57:37 PM
Subject: Problem karlsuss2 2002-09-25 21:57:36: Overcurrent problem
Message-ID: <mailman.3.1356281956.4015.karlsuss2-pcs@snf.stanford.edu>

After I install the mask, I pressed LOAD button and the overcurrent error showed up. System restarted itself, but cannot pass 'LOAD' command at start. I still have my mask on and cannot remove it.



From martinez at snf.stanford.edu  Thu Sep 26 09:06:05 2002
From: martinez at snf.stanford.edu (martinez at snf.stanford.edu)
Date: Sep 26, 2002 9:06:05 AM
Subject: Problem karlsuss2 2002-09-25 21:57:36: Overcurrent problem
Message-ID: <mailman.4.1356281956.4015.karlsuss2-pcs@snf.stanford.edu>

initialized system parameters, cycled test wafer. ready for use