From hopcroft at snf.stanford.edu Wed Dec 3 15:08:07 2003 From: hopcroft at snf.stanford.edu (hopcroft at snf.stanford.edu) Date: Wed, 3 Dec 2003 15:08:07 -0800 Subject: Problem karlsuss2 2003-12-03 15:08:02: r topside objective focus needs adjustment Message-ID: The image of the mask from the right topside objective is out of focus when the focus knob is maxed out clockwise. From hopcroft at snf.stanford.edu Wed Dec 3 15:08:10 2003 From: hopcroft at snf.stanford.edu (hopcroft at snf.stanford.edu) Date: Wed, 3 Dec 2003 15:08:10 -0800 Subject: Problem karlsuss2 2003-12-03 15:08:02: r topside objective focus needs adjustment Message-ID: The image of the mask from the right topside objective is out of focus when the focus knob is maxed out clockwise. From vilanova at snf.stanford.edu Thu Dec 4 08:08:16 2003 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 4 Dec 2003 08:08:16 -0800 Subject: Problem karlsuss2 2003-12-03 15:08:02: r topside objective focus needs adjustment Message-ID: adjusted right top side focus knob. From beckwith at snf.stanford.edu Fri Dec 5 12:27:30 2003 From: beckwith at snf.stanford.edu (beckwith at snf.stanford.edu) Date: Fri, 5 Dec 2003 12:27:30 -0800 Subject: Problem karlsuss2 2003-12-05 12:27:30: non uniformity across the wafer--2um lines Message-ID: From martinez at snf.stanford.edu Fri Dec 5 13:41:41 2003 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Fri, 5 Dec 2003 13:41:41 -0800 Subject: Problem karlsuss2 2003-12-05 12:27:30: non uniformity across the wafer--2um lines Message-ID: checked intensity & uniformity CI1 intensity = 15mw/cm2 uniformity = 2.61% From vilanova at snf.stanford.edu Thu Dec 11 10:23:02 2003 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 11 Dec 2003 10:23:02 -0800 Subject: Comment karlsuss2 2003-12-11 10:23:02: mask holder Message-ID: checked mask holder hose and plug connector, everything looks good , working ok. ready to use. From vilanova at snf.stanford.edu Thu Dec 11 10:23:17 2003 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 11 Dec 2003 10:23:17 -0800 Subject: Comment karlsuss2 2003-12-11 10:23:02: mask holder Message-ID: cleared problem From kaima at snf.stanford.edu Thu Dec 11 22:51:50 2003 From: kaima at snf.stanford.edu (kaima at snf.stanford.edu) Date: Thu, 11 Dec 2003 22:51:50 -0800 Subject: Problem karlsuss2 2003-12-11 22:51:50: Karlsuss2, the 4" mask holder has bad vacuum. Message-ID: The 4" mask holder for Karlsuus2 couldn't get vacuum after 3-4 hours efforts. Since this only happens to the 4" mask holder, it must be that the connector is bad. This actually happened once about a month ago. From vilanova at snf.stanford.edu Fri Dec 12 09:42:33 2003 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 12 Dec 2003 09:42:33 -0800 Subject: Problem karlsuss2 2003-12-11 22:51:50: Karlsuss2, the 4" mask holder has bad vacuum. Message-ID: tighten mask holder screw, ok to use. From kaima at snf.stanford.edu Fri Dec 12 18:02:15 2003 From: kaima at snf.stanford.edu (kaima at snf.stanford.edu) Date: Fri, 12 Dec 2003 18:02:15 -0800 Subject: Problem karlsuss2 2003-12-12 18:02:15: Karlsuss 2 still has vacuum problem for 4" mask Message-ID: I need to use 4" mask, but I still cannot get vacuum. It always tells me "loss of mask vacuum". I put the same mask holder to Karlsuss 1, no problem. And the 5" mask holder has no problem with Karlsuss2. From vilanova at snf.stanford.edu Mon Dec 15 07:52:22 2003 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 15 Dec 2003 07:52:22 -0800 Subject: Problem karlsuss2 2003-12-12 18:02:15: Karlsuss 2 still has vacuum problem for 4" mask Message-ID: I put the 4" mask holder on karlsuss 1 to test and works fine I put it on karlsuss 2 and works fine, sometimes user dont connect the mask holder right. ok to use. From yangxu at snf.stanford.edu Wed Dec 17 07:49:24 2003 From: yangxu at snf.stanford.edu (yangxu at snf.stanford.edu) Date: Wed, 17 Dec 2003 07:49:24 -0800 Subject: Problem karlsuss2 2003-12-17 07:49:19: power souce makes sounds during exposure Message-ID: the power source for the lamp makes alarm sound during exposure From martinez at snf.stanford.edu Fri Dec 19 07:54:30 2003 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Fri, 19 Dec 2003 07:54:30 -0800 Subject: Problem karlsuss2 2003-12-17 07:49:19: power souce makes sounds during exposure Message-ID: replaced lamp