Problem karlsuss2 2003-02-25 19:26:40: wec low; loss of wafer vacuum

vlordi at snf.stanford.edu vlordi at snf.stanford.edu
Tue Feb 25 07:26:43 PST 2003


the wec pressure is about half of proper value (vacuum pressure is a little low too). after loading wafer and sliding chuck into KarlSuss2, machine attempts WEC, but fails with loss of vacuum to wafer error displayed.




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