From zappe at snf.stanford.edu Thu Jul 10 05:49:17 2003 From: zappe at snf.stanford.edu (zappe at snf.stanford.edu) Date: Jul 10, 2003 5:49:17 PM Subject: Problem karlsuss2 2003-07-10 17:49:16: Lamp exposes only half of wafer Message-ID: After alignment, the lamp doesn't travel all the way to the front. Only half of the wafer is exposed. From vilanova at snf.stanford.edu Fri Jul 11 07:13:06 2003 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Jul 11, 2003 7:13:06 AM Subject: Problem karlsuss2 2003-07-10 17:49:16: Report Clear for karlsuss2 Message-ID: lamp exposure house found on park position . re-stored lamp house , tested ok. ready to use. From slee at snf.stanford.edu Sun Jul 13 06:20:32 2003 From: slee at snf.stanford.edu (slee at snf.stanford.edu) Date: Jul 13, 2003 6:20:32 PM Subject: Problem karlsuss2 2003-07-13 18:20:31: Warning: Loss of main Pressure Message-ID: "WARNING: LOS OF MAIN PRESSURE" appeared for 3min and then diappeared. Machine is normal, now. From martinez at snf.stanford.edu Mon Jul 14 10:03:50 2003 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Jul 14, 2003 10:03:50 AM Subject: Problem karlsuss2 2003-07-13 18:20:31: Report Clear for karlsuss2 Message-ID: initialized system, ready for use From zappe at snf.stanford.edu Tue Jul 15 05:57:35 2003 From: zappe at snf.stanford.edu (zappe at snf.stanford.edu) Date: Jul 15, 2003 5:57:35 PM Subject: Problem karlsuss2 2003-07-15 17:57:35: Lamp power is way too low !!! Message-ID: From vilanova at snf.stanford.edu Wed Jul 16 07:40:47 2003 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Jul 16, 2003 7:40:47 AM Subject: Problem karlsuss2 2003-07-15 17:57:35: Report Clear for karlsuss2 Message-ID: calibrated lamp, Ci1 =15.0 , ci2 = 30.0 ok to use. From yyao at snf.stanford.edu Wed Jul 16 10:27:05 2003 From: yyao at snf.stanford.edu (yyao at snf.stanford.edu) Date: Jul 16, 2003 10:27:05 PM Subject: Problem karlsuss2 2003-07-16 22:27:05: Report Problem for karlsuss2 Message-ID: Warning: Loss of main pressure. Then machine can't start. From vilanova at snf.stanford.edu Thu Jul 17 07:52:22 2003 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Jul 17, 2003 7:52:22 AM Subject: Problem karlsuss2 2003-07-16 22:27:05: Report Clear for karlsuss2 Message-ID: initialized equipment , no errors , ok to use . From yyao at snf.stanford.edu Thu Jul 17 10:17:34 2003 From: yyao at snf.stanford.edu (yyao at snf.stanford.edu) Date: Jul 17, 2003 10:17:34 AM Subject: Problem karlsuss2 2003-07-17 10:16:59: Report Problem for karlsuss2 Message-ID: exposure time is way off. For 1.6um PR, I have to use 4.5s. Even with that, results are not stable. From vilanova at snf.stanford.edu Thu Jul 17 10:37:41 2003 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Jul 17, 2003 10:37:41 AM Subject: Problem karlsuss2 2003-07-17 10:16:59: Report Clear for karlsuss2 Message-ID: lamp calibration completed, Ci1 =15.1 From henryc at snf.stanford.edu Mon Jul 21 11:43:38 2003 From: henryc at snf.stanford.edu (henryc at snf.stanford.edu) Date: Jul 21, 2003 11:43:38 AM Subject: Problem karlsuss2 2003-07-21 11:43:37: Report Problem for karlsuss2 Message-ID: beeps during exposure on CI2. Could be because intensity is low (14.2 mW/cm2) From vilanova at snf.stanford.edu Mon Jul 21 01:39:09 2003 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Jul 21, 2003 1:39:09 PM Subject: Problem karlsuss2 2003-07-21 11:43:37: Report Clear for karlsuss2 Message-ID: channel #2 calibrated, ok to use . From yyao at snf.stanford.edu Mon Jul 21 08:48:55 2003 From: yyao at snf.stanford.edu (yyao at snf.stanford.edu) Date: Jul 21, 2003 8:48:55 PM Subject: Problem karlsuss2 2003-07-21 20:48:54: Report Problem for karlsuss2 Message-ID: I was doing the backside alignment. Can't see image through left objective. From vilanova at snf.stanford.edu Tue Jul 22 07:44:21 2003 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Jul 22, 2003 7:44:21 AM Subject: Problem karlsuss2 2003-07-21 20:48:54: Report Clear for karlsuss2 Message-ID: replaced burned backside microscope lightbulb, ok to use. From sabnis at snf.stanford.edu Wed Jul 23 11:45:12 2003 From: sabnis at snf.stanford.edu (sabnis at snf.stanford.edu) Date: Jul 23, 2003 11:45:12 AM Subject: Shutdown karlsuss2 2003-07-23 11:45:11: Report Shutdown for karlsuss2 Message-ID: System needs to be restarted From vilanova at snf.stanford.edu Wed Jul 23 01:15:53 2003 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Jul 23, 2003 1:15:53 PM Subject: Shutdown karlsuss2 2003-07-23 11:45:11: Report Clear for karlsuss2 Message-ID: exposure housing not in home position. reinitialized system . ok to use From lindaw at snf.stanford.edu Thu Jul 24 01:23:47 2003 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Jul 24, 2003 1:23:47 PM Subject: Shutdown karlsuss2 2003-07-24 13:23:43: microscope down move time out Message-ID: microscope was coming down after exposure, and just stopped part way down. Get error message of microscope down move time out. From vilanova at snf.stanford.edu Thu Jul 24 01:38:25 2003 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Jul 24, 2003 1:38:25 PM Subject: Shutdown karlsuss2 2003-07-24 13:23:43: Report Clear for karlsuss2 Message-ID: sysboot , tested ok, ready to use. From vlordi at snf.stanford.edu Tue Jul 29 04:38:50 2003 From: vlordi at snf.stanford.edu (vlordi at snf.stanford.edu) Date: Jul 29, 2003 4:38:50 PM Subject: Problem karlsuss2 2003-07-29 16:38:48: LOSS OF MAIN PRESSURE Message-ID: After loading mask & wafer, machine suddenly gave "LOSS OF MAIN PRESSURE" warning, then "DANGEROUS CONDITION!" warning, and forced a reboot. This occured about half hour after enabling. This happened twice today, the first time Mahnaz witnessed, and it occured while the machine was just sitting there with a mask loaded, but no wafer. From vilanova at snf.stanford.edu Wed Jul 30 07:39:50 2003 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Jul 30, 2003 7:39:50 AM Subject: Problem karlsuss2 2003-07-29 16:38:48: Report Clear for karlsuss2 Message-ID: Loss of main power failure due to a loss of nitrogen . checked system and is working fine now. ok to use From acremann at snf.stanford.edu Wed Jul 30 06:47:02 2003 From: acremann at snf.stanford.edu (acremann at snf.stanford.edu) Date: Jul 30, 2003 6:47:02 PM Subject: Problem karlsuss2 2003-07-30 18:47:01: Report Problem for karlsuss2 Message-ID: right BSA microscope has no light. Yves From vilanova at snf.stanford.edu Thu Jul 31 08:03:10 2003 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Jul 31, 2003 8:03:10 AM Subject: Problem karlsuss2 2003-07-30 18:47:01: Report Clear for karlsuss2 Message-ID: replaced burned lamp. ready to use.