Problem karlsuss2 2003-07-29 16:38:48: LOSS OF MAIN PRESSURE

vlordi at snf.stanford.edu vlordi at snf.stanford.edu
Tue Jul 29 04:38:50 PDT 2003


After loading mask & wafer, machine suddenly gave "LOSS OF MAIN PRESSURE" warning, then "DANGEROUS CONDITION!" warning, and forced a reboot. This occured about half hour after enabling. This happened twice today, the first time Mahnaz witnessed, and it occured while the machine was just sitting there with a mask loaded, but no wafer.




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