From martinez at snf.stanford.edu Tue Jun 24 12:55:41 2003 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Jun 24, 2003 12:55:41 PM Subject: Shutdown karlsuss2 2003-06-24 12:55:40: Report Shutdown for karlsuss2 Message-ID: bsa repair From martinez at snf.stanford.edu Tue Jun 24 04:40:26 2003 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Jun 24, 2003 4:40:26 PM Subject: Shutdown karlsuss2 2003-06-24 12:55:40: Report Clear for karlsuss2 Message-ID: backside alignment microscopes have been installed calibrated and aligned. bsa is refor use From vilanova at snf.stanford.edu Thu Jun 26 06:56:23 2003 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Jun 26, 2003 6:56:23 AM Subject: Problem karlsuss2 2003-02-10 10:16:41: Report Clear for karlsuss2 Message-ID: BSA Repaired. ready for use. From mwiemer at snf.stanford.edu Thu Jun 26 06:05:42 2003 From: mwiemer at snf.stanford.edu (mwiemer at snf.stanford.edu) Date: Jun 26, 2003 6:05:42 PM Subject: Problem karlsuss2 2003-06-26 18:05:42: Report Problem for karlsuss2 Message-ID: I loaded my mask - OK I loaded my sample using the chuck for pieces - OK I aligned my mask/sample - OK I pressed cont to go into contact (hard) - OK I pressed expose - I get an error saying loss of mask vacuume. I have tried reloading the mask, sample, etc several times to no avavail. The machine was enabled. I could not expose my samples. Thanks! -Mike From martinez at snf.stanford.edu Fri Jun 27 09:38:16 2003 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Jun 27, 2003 9:38:16 AM Subject: Problem karlsuss2 2003-06-26 18:05:42: Report Clear for karlsuss2 Message-ID: loaded and exposed wafer. could not duplicate problem From rcrane at snf.stanford.edu Fri Jun 27 01:20:22 2003 From: rcrane at snf.stanford.edu (rcrane at snf.stanford.edu) Date: Jun 27, 2003 1:20:22 PM Subject: Comment karlsuss2 2003-06-27 13:20:21: Report Comment for karlsuss2 Message-ID: Installed power booster xformer to increase the 206vac line voltage to 221vac. Lamp ps spec is 230vac+/-10%.