Problem karlsuss2 2003-06-26 18:05:42: Report Problem for karlsuss2

mwiemer at snf.stanford.edu mwiemer at snf.stanford.edu
Thu Jun 26 06:05:42 PDT 2003


I loaded my mask - OK
I loaded my sample using the chuck for pieces - OK
I aligned my mask/sample - OK
I pressed cont to go into contact (hard) - OK
I pressed expose - I get an error saying loss of mask vacuume.  I have tried reloading the mask, sample, etc several times to no avavail. The machine was enabled.
I could not expose my samples.
Thanks!
-Mike




More information about the karlsuss2-pcs mailing list