From mislam at snf.stanford.edu  Tue Apr 20 11:35:47 2004
From: mislam at snf.stanford.edu (mislam at snf.stanford.edu)
Date: Tue, 20 Apr 2004 11:35:47 -0700
Subject: Problem karlsuss2 2004-04-20 11:35:39: Backside scope - no light on eye
Message-ID: <mailman.177.1356281958.4015.karlsuss2-pcs@snf.stanford.edu>




From parco at snf.stanford.edu  Tue Apr 20 13:06:38 2004
From: parco at snf.stanford.edu (parco at snf.stanford.edu)
Date: Tue, 20 Apr 2004 13:06:38 -0700
Subject: Problem karlsuss2 2004-04-20 13:06:37: Objective lens travel
Message-ID: <mailman.178.1356281958.4015.karlsuss2-pcs@snf.stanford.edu>

Objective lens travel only the y axis, not the x axis.  The equipment is only good for 1st litho step process (expose)



From vilanova at snf.stanford.edu  Tue Apr 20 14:48:19 2004
From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu)
Date: Tue, 20 Apr 2004 14:48:19 -0700
Subject: Problem karlsuss2 2004-04-20 11:35:39: Backside scope - no light on eye
Message-ID: <mailman.179.1356281958.4015.karlsuss2-pcs@snf.stanford.edu>

replaced dead bulb, ok to use.



From vilanova at snf.stanford.edu  Tue Apr 20 14:49:36 2004
From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu)
Date: Tue, 20 Apr 2004 14:49:36 -0700
Subject: Problem karlsuss2 2004-04-20 13:06:37: Objective lens travel
Message-ID: <mailman.180.1356281958.4015.karlsuss2-pcs@snf.stanford.edu>

checked Top & Bottom objectives both are working fine
I couldnt repeat the problem , ok to use.