Problem karlsuss2 2004-04-20 13:06:37: Objective lens travel

parco at snf.stanford.edu parco at snf.stanford.edu
Tue Apr 20 13:06:38 PDT 2004


Objective lens travel only the y axis, not the x axis.  The equipment is only good for 1st litho step process (expose)




More information about the karlsuss2-pcs mailing list