From barlian at snf.stanford.edu Sun Aug 8 23:56:13 2004 From: barlian at snf.stanford.edu (barlian at snf.stanford.edu) Date: Sun, 8 Aug 2004 23:56:13 -0700 Subject: Problem karlsuss2 SNF 2004-08-08 23:56:13: the transport could not go in Message-ID: I followed normal procedure, but it seems that the transport is stucked to something after I unloaded my wafer From vilanova at snf.stanford.edu Mon Aug 9 07:48:37 2004 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 9 Aug 2004 07:48:37 -0700 Subject: Problem karlsuss2 SNF 2004-08-08 23:56:13: the transport could not go in Message-ID: the transport was hitting the wec Unit because the user tried to take out the wafer while in contact .( please do not do that because this will damage the wec and it will cost a lot to repair i)t I had to reset the wec Unit ,checked ok ready to use. From pnataraj at snf.stanford.edu Mon Aug 9 08:53:20 2004 From: pnataraj at snf.stanford.edu (pnataraj at snf.stanford.edu) Date: Mon, 9 Aug 2004 08:53:20 -0700 Subject: Problem karlsuss2 SNF 2004-08-09 08:53:18: loss of vacuum error Message-ID: I tryed many times loading the wafer. It displays loss of vacuum, I tryed using other substrates holder still experience the same problem. From vilanova at snf.stanford.edu Mon Aug 16 14:04:47 2004 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 16 Aug 2004 14:04:47 -0700 Subject: Shutdown karlsuss2 SNF 2004-08-16 14:04:46: maintenance in progress Message-ID: From martinez at snf.stanford.edu Tue Aug 17 14:17:40 2004 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Tue, 17 Aug 2004 14:17:40 -0700 Subject: Shutdown karlsuss2 SNF 2004-08-16 14:04:46: maintenance in progress Message-ID: system avalable for use, will NOT resolve less than 5um. problem status remains From mahnaz at snf.stanford.edu Fri Aug 20 17:55:27 2004 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Fri, 20 Aug 2004 17:55:27 -0700 Subject: Problem karlsuss2 SNF 2004-08-09 08:53:18: loss of vacuum error Message-ID: The wec has been polished nad calibirated again. I did few tests and looks much bettre but some area on the wferas, I was not able to resolve less than 2.5 um. Please please if you see the system is misbehaving please SHUT it down. From yinliu at snf.stanford.edu Fri Aug 20 22:32:43 2004 From: yinliu at snf.stanford.edu (yinliu at snf.stanford.edu) Date: Fri, 20 Aug 2004 22:32:43 -0700 Subject: Problem karlsuss2 SNF 2004-08-20 22:32:42: KS has mechanical problems Message-ID: microscope can not move down. Can not change mask by pushing corresponding button. From vilanova at snf.stanford.edu Sat Aug 21 08:55:04 2004 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Sat, 21 Aug 2004 08:55:04 -0700 Subject: Comment karlsuss2 SNF 2004-08-21 08:55:03: Top MIcroscope Message-ID: the top microscope is working fine now, I guess the karlsuss service guy left it at the home position . I dont know if I should take it out of the yellow light thats why i,m leaving the system on yellow because Im not sure if we resolved the WEC Problem last friday afternoon . From vilanova at snf.stanford.edu Mon Aug 23 07:02:58 2004 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 23 Aug 2004 07:02:58 -0700 Subject: Problem karlsuss2 SNF 2004-08-20 22:32:42: KS has mechanical problems Message-ID: Sorry I did not clear this problem saturday because I did not read my emails , aparently everything is fine now ok to use. From vilanova at snf.stanford.edu Mon Aug 23 07:03:16 2004 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 23 Aug 2004 07:03:16 -0700 Subject: Comment karlsuss2 SNF 2004-08-21 08:55:03: Top MIcroscope Message-ID: TOp MIcroscope adjusted , ok to use. From quickwin at snf.stanford.edu Thu Aug 26 15:49:14 2004 From: quickwin at snf.stanford.edu (quickwin at snf.stanford.edu) Date: Thu, 26 Aug 2004 15:49:14 -0700 Subject: Problem karlsuss2 SNF 2004-08-26 15:49:14: Loss of MASK vacuum; machine does not expose Message-ID: We tried backside alignment. When we pressed "expose" button, there is an error message saying "Loss of mask vacuum" and the machine automatically went to loading step instead of giving you an option to expose regardless of what happened. From martinez at snf.stanford.edu Thu Aug 26 16:24:19 2004 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Thu, 26 Aug 2004 16:24:19 -0700 Subject: Problem karlsuss2 SNF 2004-08-26 15:49:14: Loss of MASK vacuum; machine does not expose Message-ID: system is in use. no problem found From mahnaz at snf.stanford.edu Thu Aug 26 16:31:33 2004 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Thu, 26 Aug 2004 16:31:33 -0700 Subject: Problem karlsuss2 SNF 2004-08-26 16:31:33: not able to resolve 2.5 um and less Message-ID: due to some damage to WEC unit.