Problem karlsuss2 SNF 2004-08-26 15:49:14: Loss of MASK vacuum; machine does not expose

quickwin at quickwin at
Thu Aug 26 15:49:14 PDT 2004

We tried backside alignment. When we pressed "expose" button, there is an error message saying "Loss of mask vacuum" and the machine automatically went to loading step instead of giving you an option to expose regardless of what happened. 

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