From crichter at snf.stanford.edu  Tue Jan  6 17:34:49 2004
From: crichter at snf.stanford.edu (crichter at snf.stanford.edu)
Date: Tue, 6 Jan 2004 17:34:49 -0800
Subject: Problem karlsuss2 2004-01-06 17:34:48: left topside lighting is faint
Message-ID: <mailman.149.1356281958.4015.karlsuss2-pcs@snf.stanford.edu>




From vilanova at snf.stanford.edu  Wed Jan  7 07:00:08 2004
From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu)
Date: Wed, 7 Jan 2004 07:00:08 -0800
Subject: Problem karlsuss2 2004-01-06 17:34:48: left topside lighting is faint
Message-ID: <mailman.150.1356281958.4015.karlsuss2-pcs@snf.stanford.edu>

top leftside  microscope light adjusted. ok to use. 



From yangxu at snf.stanford.edu  Thu Jan  8 20:08:38 2004
From: yangxu at snf.stanford.edu (yangxu at snf.stanford.edu)
Date: Thu, 8 Jan 2004 20:08:38 -0800
Subject: Problem karlsuss2 2004-01-08 20:08:38: lamp power source sounded alarm
Message-ID: <mailman.151.1356281958.4015.karlsuss2-pcs@snf.stanford.edu>

During the exposure, the power source of the lamp sounded high pitch alarm



From martinez at snf.stanford.edu  Fri Jan  9 09:06:17 2004
From: martinez at snf.stanford.edu (martinez at snf.stanford.edu)
Date: Fri, 9 Jan 2004 09:06:17 -0800
Subject: Problem karlsuss2 2004-01-08 20:08:38: lamp power source sounded alarm
Message-ID: <mailman.152.1356281958.4015.karlsuss2-pcs@snf.stanford.edu>

calibrated CI1. CI1 = 15mw/cm2



From mahnaz at snf.stanford.edu  Tue Jan 20 09:48:00 2004
From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu)
Date: Tue, 20 Jan 2004 09:48:00 -0800
Subject: Problem karlsuss2 2004-01-20 09:47:59: not able to resolve 2.5 um and less
Message-ID: <mailman.153.1356281958.4015.karlsuss2-pcs@snf.stanford.edu>




From martinez at snf.stanford.edu  Wed Jan 21 14:45:14 2004
From: martinez at snf.stanford.edu (martinez at snf.stanford.edu)
Date: Wed, 21 Jan 2004 14:45:14 -0800
Subject: Problem karlsuss2 2004-01-20 09:47:59: not able to resolve 2.5 um and less
Message-ID: <mailman.154.1356281958.4015.karlsuss2-pcs@snf.stanford.edu>

cleaned chuck calibrated lamp intensity
1.0um lines on test wafer look good.



From raychen at snf.stanford.edu  Tue Jan 27 01:08:57 2004
From: raychen at snf.stanford.edu (raychen at snf.stanford.edu)
Date: Tue, 27 Jan 2004 01:08:57 -0800
Subject: Problem karlsuss2 2004-01-27 01:08:56: Karlsuss2 remains "ON" after being disabled
Message-ID: <mailman.155.1356281958.4015.karlsuss2-pcs@snf.stanford.edu>

We finished using Karlsuss2 and disabled it. But the "ON" button still lit after that. 



From vilanova at snf.stanford.edu  Tue Jan 27 07:48:48 2004
From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu)
Date: Tue, 27 Jan 2004 07:48:48 -0800
Subject: Problem karlsuss2 2004-01-27 01:08:56: Karlsuss2 remains "ON" after being disabled
Message-ID: <mailman.156.1356281958.4015.karlsuss2-pcs@snf.stanford.edu>

no problem found ,On and Off coral working fine , ok to use



From crozier at snf.stanford.edu  Tue Jan 27 21:13:15 2004
From: crozier at snf.stanford.edu (crozier at snf.stanford.edu)
Date: Tue, 27 Jan 2004 21:13:15 -0800
Subject: Problem karlsuss2 2004-01-27 21:13:15: left BSA lamp does not seem to work
Message-ID: <mailman.157.1356281958.4015.karlsuss2-pcs@snf.stanford.edu>




From vilanova at snf.stanford.edu  Wed Jan 28 07:53:09 2004
From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu)
Date: Wed, 28 Jan 2004 07:53:09 -0800
Subject: Problem karlsuss2 2004-01-27 21:13:15: left BSA lamp does not seem to work
Message-ID: <mailman.158.1356281958.4015.karlsuss2-pcs@snf.stanford.edu>

replaced lamp.