Shutdown karlsuss2 2004-03-10 16:52:58: shutdown
martinez at snf.stanford.edu
martinez at snf.stanford.edu
Wed Mar 10 16:52:58 PST 2004
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Problem karlsuss2 2004-03-10 14:07:11: lost always vac of sub
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Shutdown karlsuss2 2004-03-10 16:52:58: shutdown
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loss of wafer vac, mask vac.
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Problem karlsuss2 2004-03-10 14:07:11: lost always vac of sub
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Shutdown karlsuss2 2004-03-10 16:52:58: shutdown
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