Problem karlsuss2 SNF 2004-11-03 18:44:43: can not load wafer

yinliu at snf.stanford.edu yinliu at snf.stanford.edu
Wed Nov 3 18:44:44 PST 2004


when loading wafer, machine showed OVER CURRENT, and ask to press enter.  when press enter, mask fell down.  repeated twice, same results.




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