Problem karlsuss2 SNF 2004-11-09 11:49:08: lamp power low
zappe at snf.stanford.edu
zappe at snf.stanford.edu
Tue Nov 9 11:49:09 PST 2004
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Problem karlsuss2 SNF 2004-11-03 18:44:43: can not load wafer
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Problem karlsuss2 SNF 2004-11-09 11:49:08: lamp power low
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machine beeps during exposure lamp power shows 14 mW
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Problem karlsuss2 SNF 2004-11-03 18:44:43: can not load wafer
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Problem karlsuss2 SNF 2004-11-09 11:49:08: lamp power low
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