From una at snf.stanford.edu Fri Oct 1 17:29:52 2004 From: una at snf.stanford.edu (una at snf.stanford.edu) Date: Fri, 1 Oct 2004 17:29:52 -0700 Subject: Comment karlsuss2 SNF 2004-10-01 17:29:51: over current error Message-ID: I got an error say "over current" or something like that when I was loading a wafer and the machine shutdown and rebooted. From ami at snf.stanford.edu Fri Oct 8 00:14:06 2004 From: ami at snf.stanford.edu (ami at snf.stanford.edu) Date: Fri, 8 Oct 2004 00:14:06 -0700 Subject: Problem karlsuss2 SNF 2004-10-08 00:14:05: loss of mask vacuum Message-ID: cleaned holder, mask but no improvement From vilanova at snf.stanford.edu Fri Oct 8 07:47:45 2004 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 8 Oct 2004 07:47:45 -0700 Subject: Problem karlsuss2 SNF 2004-10-08 00:14:05: loss of mask vacuum Message-ID: Someone took out the screws that hold the mask in place and she or he put them in the wrong place of the holder, If you have a problem with equipment PLEASE do not try to fix it yourself ( I found the screwdriver used last night sitting right netx to the equipment) If you have a problem wht the equipment just report it on coral and we will fix it as soon as we can , Ok to use now. From vilanova at snf.stanford.edu Fri Oct 8 07:48:11 2004 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 8 Oct 2004 07:48:11 -0700 Subject: Comment karlsuss2 SNF 2004-10-01 17:29:51: over current error Message-ID: CLeared COmment. From kenney at snf.stanford.edu Wed Oct 13 11:41:17 2004 From: kenney at snf.stanford.edu (kenney at snf.stanford.edu) Date: Wed, 13 Oct 2004 11:41:17 -0700 Subject: Problem karlsuss2 SNF 2004-10-13 11:41:13: 10 micron misalignment Message-ID: When nicely aligned in contact, the layers are misaligned by 5-10 microns when exposed. From lindaw at snf.stanford.edu Wed Oct 20 13:07:54 2004 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Wed, 20 Oct 2004 13:07:54 -0700 Subject: Comment karlsuss2 SNF 2004-10-20 13:07:53: chuck hissing when wafer in hard contact Message-ID: When I put my wafer into hard contact, there is a hissing noise coming from the chuck/WEC unit. Not loud, but it definitely did not used to be there. Also, the chuck kind of "cluncks" after exposure as it is moving downward. From martinez at snf.stanford.edu Thu Oct 21 09:38:00 2004 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Thu, 21 Oct 2004 09:38:00 -0700 Subject: Comment karlsuss2 SNF 2004-10-20 13:07:53: chuck hissing when wafer in hard contact Message-ID: set up grab z cycled wafer From dwburns at snf.stanford.edu Fri Oct 22 07:01:12 2004 From: dwburns at snf.stanford.edu (dwburns at snf.stanford.edu) Date: Fri, 22 Oct 2004 07:01:12 -0700 Subject: Problem karlsuss2 SNF 2004-10-22 07:01:11: Suss2 Vacuum Pbm Message-ID: Loss of vacuum after WEC indicated on LCD screen From martinez at snf.stanford.edu Fri Oct 29 15:38:29 2004 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Fri, 29 Oct 2004 15:38:29 -0700 Subject: Problem karlsuss2 SNF 2004-10-22 07:01:11: Suss2 Vacuum Pbm Message-ID: set up grab z cycled five wafers with no vac errors From martinez at snf.stanford.edu Fri Oct 29 15:39:42 2004 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Fri, 29 Oct 2004 15:39:42 -0700 Subject: Problem karlsuss2 SNF 2004-10-13 11:41:13: 10 micron misalignment Message-ID: set up grab z position, adj wec pressure to .3 bar aligned two test wafers with very good results wafers are in the lab for inspection